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NO!
WARNING!
To avoid injury, never put fingers or any objects
whatsoever in the inlet port of the turbopump. The use of
the protective screen is strongly advised (optional extra). If
a vibration damper or flexible metallic bellows are used on
the inlet port, make sure that the pump is fixed to the
base.
The turbopump with ISO inlet flange must be fixed to the
vacuum chamber by means of clamps or claws. The following
table shows, for each flange and fixing device, the necessary
number of clamps or claws and the relevant fixing torque.
FLANGE
FIXING
DEVICE
ISO 100
M10 clamps
M8 claws
ISO 160
M10 clamps
M10 claws
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian
hardware.
To fix the pump by means of its base, it is necessary to use
three M6 screws fixed to the foreseen holes of the pump base.
The used screws must have a minimum strength point of 500
2
N/mm
and must be fixed with a torque of 3.1 Nm.
For installation of optional accessories, see "Technical
Information".
USE
All the instructions for the correct use of the turbopump are
contained in the control unit manual.
Read the manual carefully before using the pump.
In order to achieve a better (lower) base pressure, the pump
casing may be heated using the optional heater. While heating
the pump, the temperature of its inlet flange must not exceed
120 °C.
N.
FIXING TORQUE
4
22 Nm
8
11 Nm
4
22 Nm
8
22 Nm
24
INSTRUCTIONS FOR USE
Always use the water cooling system during the heating
operations.
WARNING!
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
Avoid impacts, oscillations or harsh movements of the pump
when in operation. The bearings may become damaged.
For pumping aggressive gases, these pumps are fitted with a
special port to allow a steady flow of inert gas (like N
pump bearing protection (see the appendix "Technical
Information").
WARNING!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
MAINTENANCE
The Turbo-V300 ICE series pump does not require any
maintenance. Any work performed on the pump must be carried
out by authorized personnel.
WARNING!
Before carrying out any work on the turbopump, disconnect it
from the supply, vent the pump by opening the appropriate
valve, wait until the rotor has stopped turning and wait until the
surface temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned pump to replace that
broken down.
NOTE
Before returning the pump to the constructor for repairs, or
replacement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be
inserted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in
accordance with the specific national standards.
CAUTION
CAUTION
CAUTION
, Ar) for
2
87-900-897-01(C)
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