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GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions,
improper
use
by
untrained
interference with the equipment or any action contrary to that
provided for by specific national standards.
The DRYVAR 150 is an integrated system with a turbo-
molecular pump for high and ultra-high vacuum applications
associated with its relevant controller and its primary pump.
The system can pumps any type of gas or gas compound. It is
not suitable for pumping liquids or solid particles. The pumping
action is obtained through a high speed turbine (max. 62000
rpm) driven by a high-performance 3-phase electric motor. The
DRYVAR 150 is free of contaminating agents and, therefore, is
suitable for applications requiring a "clean" vacuum.
The DRYVAR 150 is equipped with auxiliary connectors to
control the vent valve, to be controlled from a remote site by
means of an host computer connected through a serial line.
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the
equipment. Detailed information is supplied in the appendix
"Technical Information".
This manual uses the following standard protocol:
! ! ! !
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
! ! ! !
CAUTION
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
When transporting and storing the pumps, the following
environmental requirements should not be exceeded:
−
temperature: from -20° to +70 °C
−
relative humidity: 0 - 95% (non-condensing)
If the storage time is long start the pump using the SOFT
START mode.
PREPARATION FOR INSTALLATION
The DRYVAR 150 is supplied in a special protective packing. If
this shows signs of damage which may have occurred during
transport, contact your local sales office.
When unpacking the system, be sure not to drop it and avoid
any kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies with
EEC Directive 85/399.
! ! ! !
CAUTION
In order to prevent outgassing problems, do not use bare hands
to handle components which will be exposed to vacuum.
Always use gloves or other appropriate protection.
NOTE
Normal exposure to the environment cannot damage the
DRYVAR 150. Nevertheless, it is advisable to keep it closed
until it is installed in the system, thus preventing any form of
pollution by dust.
persons,
non-authorized
WARNING!
INSTALLATION
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk.
During operation, the following environmental conditions must
be respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 °C to +35 °C
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical
Information" for detailed information.
The DRYVAR 150 can be installed in any position. Fix the
DRYVAR 150 in a stable position connecting the inlet flange of
the turbopump to a fixed counter-flange capable of withstanding
a torque of 221 Nm around its axis.
! ! ! !
Do not remove the adhesive and protective cap before
connecting the turbopump to the system.
23
INSTRUCTION MANUAL
CAUTION!
87-900-920-01(B)
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