Tabla de contenido
Publicidad
Connection B - FORE-VACUUM PUMP
A flange KF 16 NW is available to connect the
Turbo-V301 pump to the fore-vacuum pump. A
hose or vacuum approved pipe can be used. If a
rigid pipe is used, any vibration generated by the
mechanical pump must be eliminated through the
use of bellows.
NOTE
The Turbo-V301 pump is characterized by its high
compression ratio also for oil vapors. When using
a mechanical oil-sealed pump, it is advisable to
install a suitable trap between the turbopump and
the fore-vacuum pump in order to prevent oil back-
streaming.
Connection C - ELECTRICAL
The turbopump is connected to the controller
through an 6-pin connector. Pins B, C and D are
the 3-phase supply to the motor, pins A and F are
connected to the temperature sensor (NTC type,
30 KΩ resistance at 25° C) and pin E is connected
to the pump ground.
If the temperature sensor is disconnected, the
pump will not start. To prevent damage to the
pump when the temperature exceeds 60° C, the
sensor automatically cuts out the power supply.
PUMP USED WITH CORROSIVE GASES
To prevent damage to the bearings, an inert gas
must flow into the pump body around the upper
bearing towards the forevacuum line. To supply
the inert purge gas (e. g. nitrogen) to the pump
through the purge port, connect a gas purge valve
between the pressure regulator and the pump.
Adjust the pressure regulator in order to read a
gas flow rate of 0.1 to 0.8 mbar l/s.
To prevent bearing damage, Varian suggests a
minimum purge gas flow rate of 10 sccm (0.17
mbar l/s). This value can be exceeded, according
to the process requirements. Please contact Var-
ian for specific applications.
The purge gas throughput with the recommended
forepump of 15 m
high vacuum pressure in the 10
The recommended gas flow maintains a pressure
into the pump body higher than the forevacuum
pressure.
The recommended procedure to vent the system
and the pump avoiding the contact between the
pump bearings and the corrosive gas is described
in the following points:
1.
Close the corrosive gas flow into the system.
2.
Leaving the Turbo-V pump and the backing
pump running and the purge gas flowing, wait
for enough time to evacuate the corrosive gas
from the system.
3.
Turn off the Turbopump.
4.
Open the Turbo-V vent port slowly until to
reach atmospheric pressure in the system.
5.
When the Turbo-V pump and the backing
pump are stopped and the system is at at-
mospheric pressure, for a better bearing pro-
tection it is advisable to leave the purge gas
flowing into the Turbo-V pump, with the
chamber or the Turbo-V vent valve opened, to
avoid system overpressures. If the vent valve
can't be kept opened, the backing pump
should be left operating.
1. Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve
89/90
TECHNICAL INFORMATION
!
CAUTION
3
/h (11 CFM) allows to achieve a
-8
mbar range.
Purge layout
87-900-946-01(G)
Publicidad
Tabla de contenido
