GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring
due to non-compliance, even partial, with these instructions,
improper use by untrained persons, non-authorized interfer-
ence with the equipment or any action contrary to that provided
for by specific national standards.
The TV 551/701 Navigator is an integrated system with a
turbo-molecular pump for high and ultra-high vacuum applica-
tions with its relevant controller. The system can pumps any
type of gas or gas compound. It is not suitable for pumping
liquids or solid particles. The pumping action is obtained
through a high speed turbine (max. 42000 rpm) driven by a
high-performance 3-phase electric motor. The TV 551/701
Navigator is free of contaminating agents and, therefore, is
suitable for applications requiring a "clean" vacuum.
It is equipped with auxiliary connectors to supply an additional
fan, to control the vent valve, to be controlled from a remote
site by means of an host computer connected through a serial
line (RS232 or RS485).
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the equip-
ment. Detailed information is supplied in the appendix "Techni-
cal Information".
This manual uses the following standard protocol:
! ! ! !
WARNING!
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not fol-
lowed correctly, could lead to serious injury.
! ! ! !
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
When transporting and storing the pumps, the following envi-
ronmental requirements should not be exceeded:
−
temperature: from -20° to +70 °C
−
relative humidity: 0 - 95% (non-condensing)
If the storage time is long start the pump using the SOFT
START mode.
PREPARATION FOR INSTALLATION
The TV 551/701 Navigator is supplied in a special protective
packing. If this shows signs of damage which may have oc-
curred during transport, contact your local sales office.
When unpacking the system, be sure not to drop it and avoid
any kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies with
EEC Directive 85/399.
! ! ! !
In order to prevent outgassing problems, do not use bare
hands to handle components which will be exposed to vac-
uum. Always use gloves or other appropriate protection.
NOTE
Normal exposure to the environment cannot damage the TV
551/701 Navigator. Nevertheless, it is advisable to keep it
closed until it is installed in the system, thus preventing any
form of pollution by dust.
CAUTION
CAUTION
INSTALLATION
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk. Dur-
ing operation, the following environmental conditions must be
respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 °C to +35 °C (see the diagram pres-
sure-temperature in the appendix "Technical Information")
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical In-
formation" for detailed information.
The TV 551/701 Navigator must be connected to a primary
pump (see "Technical Information").
The TV 551/701 Navigator can be installed in any position. Fix
the TV 551/701 Navigator in a stable position connecting the
inlet flange of the turbopump to a fixed counter-flange capable
of withstanding a torque of 4000 Nm around its axis.
The turbopump with ISO inlet flange must be fixed to the vac-
uum chamber by means of clamps or claws. The following ta-
ble shows, for each flange and fixing device, the necessary
number of clamps or claws and the relevant fixing torque.
FLANGE
FIXING
DEVICE
ISO 100
M10 clamps
M8 claws
ISO 160
M10 clamps
M10 claws
ISO 200
M10 clamps
M10 claws
Do not remove the adhesive and protective cap before con-
necting the turbopump to the system.
23
INSTRUCTION MANUAL
N.
FIXING
TORQUE
4
22 Nm
8
11 Nm
4
22 Nm
8
22 Nm
6
22 Nm
12
11 Nm
! ! ! !
CAUTION!
87-900-934-01(B)