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Idiomas disponibles
Idiomas disponibles
TECHNICAL SPECIFICATION
Pumping speed
Main port:
N
: 250 l/s
2
He: 180 l/s
H
: 110 l/s
2
Total compres-
sion ratio
Base pressure*
with recommended mechanical forepump:
< 2 x 10
with recommended diaphragm forepump:
-8
2 x 10
Inlet flange
Main port: CFF 6" O.D., ISO 100
Side port: NW 40 KF
Foreline flange
NW 25 KF
Rotational speed
56000 RPM
Start-up time
< 3 minutes
Recommended
mechanical: Varian SD 300
forepump
diaphragm: Varian MD 60
Operating
any
position
Cooling
Natural air convection
requirements
Forced air or water optional
Operating ambi-
+ 5° C to + 35° C
ent temperature
Side port:
N
: 10 l/s
2
He: 10 l/s
H
: 8 l/s
2
7
N
: 1 x 10
2
3
He: 7 x 10
3
H
: 2 x 10
2
-10
-10
mbar (1.5 x 10
Torr)
-8
mbar (1.5 x 10
Torr)
Coolant water
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
electrical conductivity: ≤ 500 µS/cm
Bakeout
120° C at inlet flange maximum
temperature
(CF flange)
80° C at inlet flange maximum
(ISO flange)
Vibration level
< 0.01 µm at inlet flange
(displacement)
Noise level
≤ 45 dB (A) at 1 meter
Input
90 Vac, three phase, 933 Hz
Lubricant
permanent lubrication
Storage
- 20° C to + 70° C
temperature
Weight kg (lbs)
10 (22)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
UPPER VIEW
BOTTOM VIEW
87-900-882-01(B)
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