Tabla de contenido
Publicidad
Screw the flange mod. 969-9109 on the pump,
taking care of the o-ring right position.
Assemble the seal ring and lock the vent device in
position using the KF klamp.
VIBRATION ISOLATOR INSTALLATION
A vibration damper model 969-9340 for ISO 63
inlet flange version pump is available as accesso-
ries.
It typically reduces the vibration transmitted from
the Turbo-V 70LP pump to the system by a factor
of 20.
Please refer to the relevant instruction manual.
TYPICAL LAYOUT DIAGRAM
1.
Turbo-V controller
2.
Vent valve
3.
Vacuum pump shut-off valve (optional)
4.
System vent valve (optional)
5.
Vacuum chamber
6.
Ionization gauge
7.
Fore-vacuum pump connecting flange
8.
Oil mist eliminator
9.
Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
Connection A - HIGH VACUUM FLANGE
To connect the Turbo-V70LP pump to the ISO
inlet flange, remove the outer ring and position the
centering ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
34
TECHNICAL INFORMATION
87-900-862-01(E)
Publicidad
Tabla de contenido
