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Enlaces rápidos
Turbo-V250SF
969-9009 series
969-9010 series
87-900-881-01(B)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Manuales relacionados para Varian Turbo-V250SF 969-9009 Serie
Resumen de contenidos para Varian Turbo-V250SF 969-9009 Serie
- Página 1 MANUALE DI ISTRUZIONI Turbo-V250SF BEDIENUNGSHANDBUCH pumps NOTICE DE MODE DíEMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU«’ES BEDRIJFSHANDLEIDING 969-9009 series INSTRUKSTIONSBOG 969-9010 series BRUKSANVISNING INSTRUKSJON MANUAL OHJEKƒSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-881-01(B) APRIL 2002...
- Página 2 Turbo-V 250SF...
- Página 5 ISTRUZIONI PER LíUSO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE DíEMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRU«’ES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KƒYTT÷OHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE....................
- Página 6 "Technical Information" per ulteriori dettagli. Le pompe turbomolecolari della serie Turbo-V 250SF devono NOTA essere utilizzate solo con uno degli appositi controllori Varian Le note contengono informazioni importanti estrapolate dal (serie 969-9423, 969-9504, 969-9523, 969-9425 e 969-9866) e testo.
- Página 7 In caso di guasto Ë possibile usufruire del servizio di "Technical Information". riparazione Varian o del "Varian advanced exchange service", Per fissare la pompa per mezzo della sua base, Ë necessario che permette di ottenere una pompa rigenerata in sostituzione utilizzare tre viti M4 fissate agli appositi fori presenti sulla base di quella guasta.
- Página 8 flem Gebrauch durch ungeschultes Personal, nicht autorisier- ten Eingriffen und Miflachtung der einheimischen, hier zur Geltung kommenden Bestimmungen ¸bernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V 250SF handelt es sich um Turbomolekularpumpen f¸r Hoch- und Ultrahochvakuuman- wendungen.
- Página 9 Klemmschellen an die Vakuumkammer an- geschlossen werden. In der nachstehenden Tabelle sind die Anzahl der jeweils erforderlichen Klemmschellen sowie der jewei- Bei einem Defekt kann der Varian Service oder der " advanced lige Anzugsmoment angegeben. exchange service" in Anspruch genommen werden.
- Página 10 Varian, avant d'utiliser l'appareil. Varian dÈcline par consÈquent toute responsabilitÈ en cas d'inobservation totale ou partielle des instructions donnÈes, d'utilisation incorrecte de la part d'un personnel non formÈ, d'opÈrations non autorisÈes ou d'un emploi contraire...
- Página 11 "advanced exchange service", remplir et La turbopompe ‡ bride díentrÈe ConFiat doit Ítre fixÈe ‡ la faire parvenir au bureau local Varian la fiche "SÈcuritÈ et chambre ‡ vide ‡ líaide des ÈlÈments mÈcaniques Varian SantÈ" annexÈe ‡ la prÈsente notice d'instructions. Une copie prÈvus ‡...
- Página 12 Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco...
- Página 13 En caso de averÌa se podr· utilizar el servicio de reparaciÛn Varian o el "Varian advanced exchange service", que permite BRIDA TIPO DE MORDAZA PAR DE obtener una bomba regenerada para sustituir la averiada.
- Página 14 Varian antes de usar a aparelhagem. A Varian n„o se responsabiliza pela eventual inobserv‚ncia total ou parcial das instruÁıes, pelo uso indevido por parte de pessoas n„o treinadas, por operaÁıes n„o autorizadas ou pelo uso contr·rio ‡s normas...
- Página 15 Em caso de defeito È possÌvel usufruir do serviÁo de reparaÁ„o Varian ou do "Varian advanced exchange service", que permite FLANGE TIPO DE BORNE TORQUE...
- Página 16 Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik...
- Página 17 In geval van storing is het mogelijk om de reparatiedienst van FLENS KLEMTYPE AANHAALKOPPEL Varian of de "Varian advanced exchange service" in te ISO 100 Dubbele klem 22 Nm schakelen: zo krijgt men een ruilpomp ter vervanging van de met M10 defecte pomp.
- Página 18 Brugeren bedes lÊse denne hÂndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er n¯je fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb pÂ...
- Página 19 TurbomolekulÊrpumperne i V 250SF serien m kun anvendes str¯mning skal ligge mellem 0.4 og 1 mbar l/s. med en af de sÊrlige Varian kontrolapparater (serie 969-9423, 969-9504, 969-9523, 969-9425 eller 969-9866) og skal forbindes med en primÊr pumpe (se skemaet i "Technical VEDLIGEHOLDELSE Information").
- Página 20 Anv‰ndaren bˆr l‰sa denna bruksanvisning, samt ˆvrig dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. Varian tar inget ansvar fˆr skador helt eller delvis till fˆljd av Âsidos‰ttande av instruktionerna, ol‰mplig anv‰ndning av person utan tillr‰cklig kunskap, obehˆrigt bruk av utrustningen eller hantering som strider mot g‰llande lokala fˆreskrifter.
- Página 21 Denna pumptyp ‰r fˆrsedd med ett specialuttag dit ett ‰delgasflˆde mellan 0.4 och 1 mbar l/s skall anslutas. Turbomolekyl‰rpumparna i serien V 250SF mÂste anv‰ndas med en s‰rskild styrenhet frÂn Varian (serie 969-9423, 969- UNDERHJLL 9504, 969-9523, 969-9425, eller 969-9866), och anslutas till en Pumparna i Turbo-V 250SF-serien ‰r underhÂllsfria.
- Página 22 Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren b¯r lese denne brukerveiledningen og all annen informasjon fra Varian f¯r utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppf¯lging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som pÂ...
- Página 23 0.4 og 1 mbar l/s. Turbo-V 250SF serien turbo-molekulÊre pumper m kun brukes med en av de spesielle Varian kontrollere (969-9423, 969-9504, 969-9523, 969-9425 eller 969-9866), og m koples VEDLIKEHOLD til hovedpumpen (se skjema i "Teknisk informasjon").
- Página 24 YLEISIƒ TIETOJA T‰m‰ laite on tarkoitettu ammattimaiseen k‰yttˆˆn. Ennen laitteen k‰yttˆˆnottoa tulee k‰ytt‰j‰n lukea huolellisesti mukana seuraava k‰yttˆohje sek‰ kaikki muu Varianin toimittama lis‰tieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen k‰yttˆohjeiden t‰ydest‰ tai osittaisesta laiminlyˆnnist‰, ammattitaidottoman henkilˆn virheellisest‰ laitteen k‰ytˆst‰,...
- Página 25 Sarjan 250SF turbomolekyylipumppuja tulee k‰ytt‰‰ ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- 9423, 969-9504, 969-9523, 969-9425 tai 969-9866) ja niiden HUOLTO t‰ytyy olla yhdistettyin‰ p‰‰pumppuun (katso kaaviota osasta Sarjan Turbo-V 250SF pumput eiv‰t vaadi lainkaan huoltoa. "Technical Information").
- Página 26 £llh pr“sqeth plhrofor∂a pou d∂nei h Varian, prin ap“ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euq⁄nh “son afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgiËn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpiko⁄, auqa∂retej epemb£seij ˇ crˇsh pou den sumfwne∂...
- Página 27 FLANTZA TUPOS MEGGENHS ZEUGOS Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj BIDWMATOS Varian ˇ sto ìVarian advanced exchange serviceî, pou saj d∂nei th ISO 100 22 Nm Diplˇ m◊ggenh dunat“thta na antikatastˇsete thn calasm◊nh antl∂a me m∂a el∂kwsh M10...
- Página 28 This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper...
- Página 29 The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Varian In the case of breakdown, contact your local Varian service hardware. See the appendix "Technical Information" for a center who can supply a reconditioned pump to replace that detailed description.
- Página 30 TECHNICAL INFORMATION During normal operation, the motor functions with a DESCRIPTION OF THE TURBOPUMP power feed at 58 Vac three-phase at 933 Hz. To The Turbo-V250SF pump is available in two ver- reduce losses during start-up to a minimum, the sions.
- Página 31 TECHNICAL INFORMATION TECHNICAL SPECIFICATION Dimensions: inches [mm] Operating ambient + 5n C to + 35n C Pumping speed (l/s) Main port: Side port: temperature : 250 l/s : 10 l/s He: 220 l/s He: 10 l/s Coolant water flow: 30 l/h (0.13 GPM) : 200 l/s : 8 l/s temperature: + 10n C to + 30n C...
- Página 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-881-01(B)
- Página 33 TECHNICAL INFORMATION INLET SCREEN INSTALLATION Overall dimensions with the protection screen fitted The inlet screens mod. 969-9302 prevents the on pump series 969-9009 (with ISO 100 flange). blades of the pump from being damaged by debris greater than 0.7 mm diameter. The inlet screen, however, does reduce the pump- ing speed by about 10%.
- Página 34 TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION The metallic model is assembled as shown in the figure. Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (metal- lic model), and 969-9347 (plastic model).
- Página 35 TECHNICAL INFORMATION BASE FIXING KIT INSTALLATION For the feet to the pump by tightening the previ- The kit mod. 969-9326 enables the pump to be ously inserted grub screws with the Allen key. fixed at the base. Open the package containing the feet and respec- tive screws.
- Página 36 TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION SIDE MOUNTING Two fan kits are available for air cooling the pump, when natural air convenction is insufficient. Specification for small fan (mod. 969-9310): − air flow: 9 l/s (10 CFM) − input voltage: 24 Vdc −...
- Página 37 TECHNICAL INFORMATION VENT VALVE INSTALLATION Screw the vent valve into the pump. The vent valve mod. 969-9833 enables undesired venting of the pump during a temporary power fail- ure (5 sec maximum) to be avoided, and enables an automatic vent operation. Tighten the valve using a 16 mm hexagonal span- ner.
- Página 38 TECHNICAL INFORMATION VENT DEVICE INSTALLATION VIBRATION ISOLATOR INSTALLATION Two vibration isolators for ISO and CFF inlet flange version pumps are available as accessories. The two model part numbers are the following: − model 969-9342 for ISO 100 flange; − model 969-9332 for CFF 6î flange. They typically reduce the vibration transmitted from the Turbo-V250SF pump to the system by a factor of 20.
- Página 39 TECHNICAL INFORMATION For ConFlat flange connections we recommend TYPICAL CONNECTIONS using Varian hardware. High Vacuum Flange Connection To facilitate assembly and dismantling, apply Fel- To connect the Turbo-V250SF pump to the ISO pro C-100 high temperature lubricant to the screw...
- Página 40 CAUTION chanical pump must be eliminated through the use To prevent bearing damage, Varian suggests a of bellows. minimum purge gas flow rate of 10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process requirements.
- Página 41 Forepump MDP 30, 120 V 949-9451 Forepump MDP 30, 220 V 949-9452 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-881-01(B)
- Página 42 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Página 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Página 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...