Description Of The Tv 1001 Sem; Pump Description - Varian TV 1001 SEM Manual De Instrucciones

DESCRIPTION OF THE TV 1001 SEM

The TV 1001 SEM pumping system consists of a
pump with a dedicated controller fixed to it. The
system is available in two models that differ in the
high vacuum flange.
The TV 1001 SEM pump two models are:
−
Model 969-8939 with ISO 200K high vacuum
flange;
−
Model 969-8940 with ISO 200F high vacuum
flange.
The following figures show the two models.
Turbo - V 1001 SEM
Model 969-8939
Turbo V 1001 SEM
-
Model 969-8940
The controller model 969-8978 is also available as
an option.
Controller model 969-8978
Macro Torr
Macro Torr

Pump Description

The pump consists of a high frequency motor driv-
ing a turbine fitted with 8 bladed stages and 4
Macrotorr stages. The turbine rotates in an anti-
clockwise direction when viewed from the high
vacuum flange end.
The turbine is made of high-strength aluminium
alloy, machined from a single block.
Proceeding from the high vacuum to the for vac-
uum region, the turbine stages sequence is:
•
1st stage with a blade angle of 40°,
•
2nd stage with a blade angle of 34°,
•
3rd stage with a blade angle of 28°,
•
4th and 5th stages with a blade angle of 24°,
•
6th stage with a blade angle of 20°,
•
7th and 8th stages with a blade angle of 16°.
The Macrotorr stages are in the form of four discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding
rotor discs. These are made of aluminium alloy.
The pump can be water cooled or air cooled: in the
first case the customer can use the dedicated
channels on the pump body, in the second case
an external optional fan is available.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The pump is balanced after assembly with a resid-
ual vibration amplitude, measured at the pump's
envelope, less than 350 mm/sec
The pump can operate in any position and can be
supported on the high vacuum flange. The
connection of the forevacuum on the side of the
pump is a KF 40 NW flange.
25
TECHNICAL INFORMATION
2
.
Turbo - V 1001 SEM Macro Torr
87-900-973-01