Connection A - High Vacuum Flange; Connection B - Fore-Vacuum Pump; Connection C - Electrical - Varian TURBO-V 6000 Manual De Instrucciones

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Connection A - HIGH VACUUM FLANGE

To connect the Turbo pump to the ISO inlet
flange, remove the outer ring and position the cen-
tering ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.

Connection B - FORE-VACUUM PUMP

A flange ISO 100 is available to connect the Tur-
bopump to the forevacuum pump. A hose or vac-
uum approved pipe can be used. If a rigid pipe is
used, any vibration generated by the mechanical
pump must be eliminated through the use of bel-
lows.
NOTE
The Turbo pump is characterised by its high com-
pression ratio also for oil vapours. When using a
mechanical oil-sealed pump, it is advisable to in-
stall a suitable trap between the turbopump and
the fore-vacuum pump in order to prevent oil back-
streaming.

Connection C - ELECTRICAL

The turbopump is connected to the controller
through two connectors: a 7-pin connector and a
14-pin connector.
The power is supplied via the 7-pin connector
where pins B, G and E are the 3-phase supply to
the motor, pin D for ground connection between
pump and controller and pins A and F are not con-
nected (see the following figure).
All the other signals are connected via the 14-pin
connector where pins B, K and I are connected to
the photodetector, pins E and D to the motor stator
thermistor, pins E and C to the body thermistor,
pins F and G to the top bearing thermistor, pins F
and H to the bottom bearing thermistor, pins A and
J to the oil level sensor and pins L, M and N are
not used (see the following figure).
30
TECHNICAL INFORMATION
87-900-838-01(B)

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969-9081969-9082

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