Agilent Technologies TwisTorr 74 FS Serie Manual De Instrucciones página 333

Figure 49
TwisTorr 74 FS User Manual / 87-901-053-01
1 Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve
Purge layout
Technical Information
Pump Used with Corrosive Gases
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