Installation and Operation Manual
X-VA-1350G-eng
Part Number: 541B205AAG
September, 2017
Greek
Brooks Instrument
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.
: (1)
. (2)
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Brooks Instrument
25 mm
25 mm
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Brooks Instrument
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1.
2.
3.
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0,5 bar (g)
(PED).
1
1
Brooks Instrument
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2014/30/EU
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CE.
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ESD (
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Brooks
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Sho-Rate
!
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Brooks Instrument.
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25 mm
1.
,
CE
EMC).
:
CE.
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Section A Essential Instructions
TM
Models 1350G/1355G
.
.
,
/
Brooks Instrument.
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,
.
.
.
(PED)
1
PED.
2014/34/EU.
PED.
(SEP).
(EMC)
CE.
.
360
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100%
,
(NMOS, SMOS
.).
.
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,
.
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A-9