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Technical Information
The IDP-3 Inlet valve Kit technical specifications are shown in the following table.
Table 7
Leak Rate:
Body
Seal
Closing time (after solenoid
valve power loss)
Closing burst
Power
Materials:
Body
Seal
Temperature Range:
Valve Body
Solenoid
170
Technical Specifications
< 1X10
<1X10
25 ms
0.01 torr-liter
7.7 W (AC), 9.5 W (DC)
Aluminum (6061-T6)
Viton
0~100 °C
0~50 °C
Agilent IDP-3 Dry Scroll Vacuum Pump User Manual
-9
atm cc/sec He
-9
atm cc/sec He
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