Use Of Twistorr 84 Fs - Agilent Technologies TwisTorr 84 FS Serie Manual De Istrucciones

Use of TwisTorr 84 FS

Ensure the proper usage of the equipment.
WARNING! The operator of this instrument is advised to use the equipment in a manner
as specified in this manual.
If the guidance of this manual is not followed, the protection provided by the
equipment may be impaired.
All the instructions to correctly use the turbopump are contained in
the controller manual. Read carefully this manual before use the
pump. To obtain better limit pressures it is possible to heat the
pump.
While heating the vacuum chamber, the temperature of the inlet flange
must not exceed 120 °C for a ConFlat flange and 80 °C for an ISO
flange. While heating always use the water cooling.
Never use the turbopump when the inlet flange is not connected to the
WARNING!
vacuum chamber. Do not touch the turbopump or any of its accessories
during the heating process. The high temperatures may cause burns.
Avoid impacts, oscillations or harsh movements of the pump when in operation.
CAUTION!
The bearings may become damaged. Use air or inert gas free from dust or
particles for venting the pump. The pressure at the vent port must be less than 2
bar (above atmospheric pressure). For pumping gases containing particulate or
aggressive pollutants for the bearings, these pumps are fitted with a special port
(integrated purge/vent device) to allow a steady flow of inert gas (He, N2, Ar) for
pump bearing protection (see the annex "Technical Information").
TwisTorr 84 FS User Manual / 87-901-043-01(B)
Instructions for Use

Use of TwisTorr 84 FS

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