Technical Specification - Agilent Technologies TV 551 SEM Navigator Manual De Instrucciones

Technical Specification

Tab. 2
CHARACTERISTIC
Pumping speed (with inlet
screen)
Compression ratio
Base pressure
(According to standard DIN 28
428, the base pressure is that
measured in a leak-free test
dome, 48 hours after the
completion of test dome bake-
out, with a Turbopump fitted
with a ConFlat flange and using
the recommended pre-vacuum
pump)
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended
forepump
Operating position
Operating ambient
temperature
Cooling
requirements
TV 551/701 SEM Navigator User Manual / 87-900-958-01(G)
N :
2
He:
H :
2
N
2
He
H
2
Mechanical
Diaphragm
Technical Information

Technical Specification

TV 551 SEM
ISO160:
550 l/s
600 l/s
510 l/s
1 x 10
9
1 x 10
7
1 x 10
6
with minimum recommended mechanical
pump:
< 1 x 10 mbar
-10
(< 1 x 10 Torr)
-10
with minimum recommended diaphragm
pump:
2 x 10 mbar
-9
(1.5 x 10 torr)
-9
ISO 160
KF 25 NW
42840 rpm
< 6 minutes
Agilent DS 302
Agilent SH 100
Any
+5 °C to +35 °C
Forced air or water cooling (use water with
electrical conductivity ≤ 500 μS/cm)
17
TV 701 SEM
ISO200:
690 l/s
620 l/s
510 l/s
1 x 10
9
1 x 10
7
1 x 10
6
ISO 200
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