17
Technical Information
Technical Specification
Technical Specification
Table 1
Pumping speed
Compression ratio
Base pressure *(with
recommended forepump)
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Cooling requirements
Operating ambient
temperature
Coolant water
Bakeout temperature
Vibration level (acceleration)
Noise level
Pwr supply (mains):
Protection fuse
Protection fuse
Compliance with:
212/268
Technical Specification
Input voltage:
Input freq.:
Max input pwr:
Stand-by pwr:
Max oper. power:
With ISO 100: N2: 250 l/s
N
: >5 x 10
7
2
mechanical:< 2 x 10-
mbar (< 1.5 x 10-
9
ISO 100
KF16 NW (KF25 – optional)
66000 RPM
< 3 minutes
mechanical: Agilent DS 102
mechanical: Agilent DS 302
dry pump: Agilent SH 110
any
Natural air convection
Forced air or water optional
+ 5 °C to + 35 °C
flow: 200 l/h (0.89 GPM)
temperature: + 10 °C to + 30 °C
pressure: 3 to 5 bar (45 to 75 Psi)
80 °C at inlet flange max. (ISO flange)
< 0.6 m/s2 at inlet flange
< 45 dB (A) at 1 meter
100 - 240 Vac
50 - 60 Hz
300 VA
10 W
100 W with water or air cooling
4 A
8 A
UNI EN 292-1
UNI EN 292-2
TV 303 User Manual / 87-901-019-01
Torr)
9
(A)