Technical Specification - Varian 969-9369 Manual De Instrucciones

TECHNICAL SPECIFICATION

The following figure shows the Turbo-V 150HT outline drawing. Dimensions are in inches [mm].
Pumping speed ISO 100:
N : 130 l/s
2
He: 120 l/s
H : 110 l/s
2
Compression ratio N : 3 x 10
2
He: 8 x 10
H : 8 x 10
2
Base pressure* with minimum recommended
mechanical pump:
-10
< 2 x 10
with minimum recommended
diaphragm pump:
-8
2 x 10 mbar (1.5 x 10
Inlet flange ISO 100, ISO 63, CFF 6", CFF 4.5"
Foreline flange KF 16 NW
Rotational speed 62000 rpm
Start-up time < 90 seconds
Recommended Mechanical: Varian SD 40
forepump Diaphragm: MD12
Operating ambient + 5° C to + 35° C
temperature
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ISO 63:
100 l/s
105 l/s
100 l/s
8
5
4
-10
mbar (< 1.5 x 10 Torr)
-8
torr)
26
TECHNICAL INFORMATION
Operating position Any
Cooling Forced air or water
requirements
Coolant water minimum flow: 30 l/h (0.13 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 4 bar
Bakeout 120° C max. at inlet flange (CF flange)
temperature 80° C max. at inlet flange (ISO flange)
Vibration level < 0.01 µm at inlet flange
(displacement)
Input 120 Vac, three phase, 1050 Hz
Lubricant permanent lubrication
Storage - 20° C to + 70° C
temperature
Weight kg (lbs) CFF: 5.6 (12.3)
ISO: 3.6 (7.9)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
87-900-891-01(C)