Installation and Operation Manual
X-A-1306-1307-eng
Part Number: 541B079AAG
October, 2016
Greek
Brooks Instrument
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Brooks Instrument.
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.
.
:
.
: (1)
. (2)
:
.
Brooks Instrument
25 mm
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Brooks Instrument
«D»
.
:
:
.
:
1.
2.
3.
:
,
,
,
,
'
,
/
.
,
,
,
,
0,5 bar (g)
(PED).
25 mm
1
1
Brooks Instrument
(
2014/30/EU
,
,
.
CE.
.
.
.
,
ESD (
,
!
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Brooks Instrument.
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1.
,
CE
EMC).
:
CE.
.
.
.
.
(ESD)
.
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.
Section A Essential Instructions
Models GT1306 and GT1307
.
.
,
/
Brooks Instrument.
.`
,
.
.
.
(PED)
25 mm
1
PED.
2014/34/EU.
PED.
(SEP).
(EMC)
CE.
100%
.
360
.
100%
,
,
.
(NMOS, SMOS
.).
.
.
,
.
.
.
A-9