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TECHNICAL SPECIFICATION
Pumping speed (l/s)
Main port:
N
: 250 l/s
2
He: 220 l/s
H
: 200 l/s
2
Compression ratio
N
: 1 x 10
2
He: 7 x 10
H
: 2 x 10
2
Maximum differen-
N
: 1 x 10
2
tial pressure ratio
Base pressure*
with recommended mechanical pump:
2 x 10
with recommended diaphragm pump:
2 x 10
Inlet flange
Main port: CFF 6" O.D., ISO 100
Side port: NW40 KF
Foreline flange
NW16 KF
Rotational speed
56000 RPM
Start-up time
< 3 minutes
Recommended
Two stage rotary pump SD-40
forepump
Diaphragm pump: MDP 30
Operating
any
position
Cooling
Natural air convection
requirements
Forced air or water optional
Side port:
N
: 10 l/s
2
He: 10 l/s
H
: 8 l/s
2
7
3
3
5
-10
-10
mbar (1.5 x 10
Torr)
-9
-10
mbar (1.5 x 10
Torr)
Dimensions: inches [mm]
Operating ambient
temperature
Coolant water
Bakeout
temperature
Vibration level
(displacement)
Noise level
Input
Lubricant
Storage
temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump.
26
TECHNICAL INFORMATION
+ 5n C to + 35n C
flow: 30 l/h (0.13 GPM)
temperature: + 10n C to + 30n C
pressure: 3 to 4 bar
electrical conductivity: ≤ 500 µS/cm
120n C at inlet flange maximum
(CF flange)
80n C at inlet flange maximum
(ISO flange)
< 0.01 µm at inlet flange
45 dB (A) at 1 meter
58 Vac, three phase, 933 Hz
permanent lubrication
- 20n C to + 70n C
5.5 (12)
87-900-881-01(B)
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