Agilent Technologies Turbo-V 3K-G Manual De Instrucciones página 305

60
50
Argon with Purge Open
40
Power Limit Applied [W]
30
20
10
0
10 15
Figure 7
The pump is balanced after assembly with a residual vibration
amplitude less than 0.01 µm.
The pump can operate in any position and must be supported on the
high vacuum flange. The connection of the forevacuum on the side of
the pump is a KF 40 NW flange.
Turbo-V 3K-G Pumping System User Manual / 87-901-011-01
Argon with Purge Closed
20 25 30
T body [°C] (Win 216)
Technical Information
Description of the Turbo-V 3K-G
Nitrogen
35 40
(C)
17
Fail
"Pump Overtemp"
45 50
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