Use - Agilent Technologies TV 1001 SEM Manual De Instrucciones

16 Instructions for Use

Use

Use

This paragraph details the fundamental operating procedures. Make
all electrical and pneumatic connections before the use of the system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C.
WARNING! Never use the turbopump when the inlet flange is not connected to the
vacuum chamber. Do not touch the turbopump or any of its accessories
during the heating process. The high temperatures may cause burns.
Avoid impacts, oscillations or harsh movements of the pump when in operation.
CAUTION!
The bearings may become damaged. Use air or inert gas free from dust or
particles for venting the pump. The pressure at the vent port must be less than 2
bar (above atmospheric pressure). For pumping aggressive gases, these pumps
are fitted with a special port to allow a steady flow of inert gas (like N
pump bearing protection (see the appendix "Technical Information").
Never use the pump with corrosive gases or vapor to avoid damage to the
CAUTION!
internal components of the pump.
WARNING! When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal. Do not
use the pump in presence of explosive gases.
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