Brooks Instrument MT36 Serie Manual De Instalación Y Funcionamiento página 13

Installation and Operation Manual
X-VA-MT3600-eng
Part Number: 541B075AAG
March, 2016
Figure 1-5 MT3602 with Alarm and Standard Valve on Inlet Dimensions
Figure 1-6 MT3602 with Alarm and Standard Valve on Outlet Dimensions
Section 1 Introduction
MT36xx Series
Ref. No. KR-3602-191
Ref. No. KR-3602-192
1-7