Vibration Isolator Installation; Typical Layout Diagram; With Navigator Controller - Varian Turbo-V 81-M Manual De Instrucciones

Then screw the vent valve into the pump and
tighten it using a 16 mm hexagonal spanner with a
torque of 2.5 Nm.
Do not overtighten the valve as this may damage
the thread on the pump.
Then connect the cable from the valve to the suit-
able connector on the controller.

VIBRATION ISOLATOR INSTALLATION

Two vibration isolators for ISO and CFF inlet
flange version pumps are available as accesso-
ries.
The two model part numbers are the following:
− model 969-9375 for ISO 63 flange;
− model 969-9376 for CFF 4.5" flange.
They typically reduce the vibration transmitted
from the Turbo-V 81-M to the system by a factor of
20.
Please refer to the relevant instruction manual.
CAUTION

TYPICAL LAYOUT DIAGRAM

With Navigator Controller

1. Turbo-V Navigator controller
2. Vent valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum chamber
6. Ionization gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Fan
15. Flexible connection
62
TECHNICAL INFORMATION
87-900-983-01(B)