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Screw the flange mod. 969-9109 on the pump,
taking care of the o-ring right position.
Assemble the seal ring and lock the vent device in
position using the KF klamp.
VIBRATION ISOLATOR INSTALLATION
A vibration damper model 969-9340 for ISO 63
inlet flange version pump is available as accesso-
ries.
It typically reduces the vibration transmitted from
the Turbo-V 70D pump to the system by a factor
of 20.
Please refer to the relevant instruction manual.
TYPICAL LAYOUT DIAGRAM
1.
Turbo-V controller
2.
Vent valve
3.
Vacuum pump shut-off valve (optional)
4.
System vent valve (optional)
5.
Vacuum chamber
6.
Ionization gauge
7.
Fore-vacuum pump connecting flange
8.
Oil mist eliminator
9.
Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
34
TECHNICAL INFORMATION
87-900-861-01(E)
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