Water Cooling Kit Installation - Varian Turbo-V 2000 ICE Manual De Instrucciones

A dedicated temperature sensor into the heating
jacket will keep the pump temperature at the de-
sired temperature.
NOTE
The turbopump must be "baked" only when
operating with an inlet pressure less than 10
mbar and with water cooling.
CAUTION
If the chamber of the system is "baked" at a high
temperature, a shield should be installed to pre-
vent thermal radiation heating the high vacuum
flange on the pump. The maximum temperature
allowed for the inlet flange is 120° C.

WATER COOLING KIT INSTALLATION

Two types of water cooling kits are available to be
mounted when the pump is used under heavy load
conditions or when air cooling is insufficient.
The two model part numbers are: 969-9338
(metallic model), and 969-9348 (plastic model).
Model 969-9338
Model 969-9348
CAUTION
The items of the plastic model kit must be assem-
bled as shown in the following figure
-4
The assembled kit must be screwed into the suit-
able holes of the pump body with a recommended
closing torque of 5 Nm.
Two 6 mm (1/4") internal diameter rubber or plastic
hoses from the water supply must be fitted to the
two nozzles.
These hoses must be held on the respective noz-
zles using hose clips to avoid that the tube(s) gets
loose or disconnected during operation.
Cooling may be carried out either through an open
circuit with eventual discharge of the water, or us-
ing a closed circuit cooling system.
The water temperature must be between +10°C
and +20°C, with an inlet pressure between 3 and 5
bar. This allows a flow of about 200 l/h.
The water electrical conductance must be
µs/cm. When the conductance is higher, in closed
water circuit, the use of up to 20% of Ethyl-Glycole
is suggested.
The overall dimensions of the pump when
equipped with the water cooling kit mounted are
shown in the following figure (dimensions are in
inches [mm]).
30
TECHNICAL INFORMATION
NOTE
NOTE
≤
87-900-915-01(E)
500