Gas Flow Control Path; Vaporization - Brooks Instrument DLI Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016

1-7-2 Gas Flow Control Path

1-7-3 Vaporization

Process gas will be delivered by the user at a pressure consistent with their
process conditions to user-supplied or a Brooks Instrument thermal mass
flow controller. The Brooks controller will provide flow control performance
accuracy of 1.0% of rate to ensure the user's specified rate of vaporization
and correct carrier gas flow delivery. It is strongly recommend that these
MFC controller(s) not be substituted after the system is designed as
Brooks cannot guarantee our vaporizer system performance when another
brand of flow controller is substituted.
The DLI vaporizer system utilizes a fine droplet atomizer technology to
perform complete vaporization of the process fluid. Unlike flash vaporizer
that operate like an over-powered hot plate where liquid is splashed,
resulting in overheating of the process fluid and often incomplete
vaporization, the DLI vaporizer system uses an atomizer to first break up
the fluid into small micron size droplets. Small droplets increase the
surface area by thousands of times making vaporization fast, efficient and
gentle. The use of hot carrier gas rather than a hot metal surface adds to
the gentle and complete vaporization with considerably less energy
required.
Section 1 Introduction
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Brooks DLI Vaporizer System
1-7