Section 1 Introduction; Introduction; How To Use This Manual; Product Support References - Brooks Instrument DLI Manual De Instalación Y Funcionamiento

Tabla de contenido

Publicidad

Idiomas disponibles
  • MX

Idiomas disponibles

  • MEXICANO, página 51
Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016

1-1 Introduction

1-2 How To Use This Manual

1-3 Product Support References

Designed for both industrial and microelectronic applications that require
high purity, high efficiency fluid vaporization, the Brooks Direct Liquid
Injection (DLI) Vaporizers deliver outstanding performance, reliability,
and flexibility. Process throughput and yield are maximized while
operating costs are reduced by the DLI Vaporizer featuring:
• 100% vaporization with no liquid carry-over
• Vapor on-demand with small liquid inventory volume
• No thermal decomposition of liquid precursors
DLI vaporizer models include the standard all-welded DLIWx for typical
applications; the high capacity DLIHV for DI Water and large mass flow
applications; and the modular DLIFS for research & development
applications
This manual is intended to provide the user with all the information
necessary to install, operate, troubleshoot and maintain these vaporizers.
The manual is organized in the following sections:

Section 1 Introduction

Section 2 Installation
Section 3 Operation
Section 4 Maintenance and Troubleshooting
Appendix A Essential Instructions
Warranty, Local Sales/Service Contact Information
It is highly recommended that this manual be read in its entirety before
attempting to operate or repair these devices.
Refer to www.BrooksInstrument.com for Brooks sales and service
locations and to obtain other documents that support the DLI Vaporizer.
Those documents include:
Brooks DLI Vaporizer data sheets:
DS- VAP-DLI Systems-eng
DS-VAP-DLIHV-Series-eng
Section 1 Introduction
®
Brooks
DLI Vaporizer System
1-1

Publicidad

Tabla de contenido
loading

Tabla de contenido