Temperature Limit Controller - Brooks Instrument DLI Manual De Instalación Y Funcionamiento

Installation and Operation Manual
X-VAP-DLI-Standard-eng
Part Number: 541B203AAG
May, 2016

2-11-2 Temperature Limit Controller

at the factory, but you will need to tune the PID settings to your specific
operating conditions in order to achieve optimal performance.
If Brooks is supplying the vaporizer electronics, two Type K thermocouple
extension cables will be supplied with the unit, If Brooks is not supplying
the electronics, the customer must provide the interface cables.
The Temperature Limit controller is used to shut off the DLI vaporizer at
the maximum safe temperature for the specific precursor being vaporized
in the event of a primary thermocouple, temperature controller, or cable
failure. The limit function acts as a safety shutdown to keep the process at
a safe operating temperature. Normally this value is 10–20°C above the
vaporizer temperature controller setpoint and must never exceed the
disassociation, decomposition, and or auto-ignition temperature of the
precursor being vaporized.
Section 2 Installation
®
Brooks DLI Vaporizer System
2-9