Tabla de contenido
Publicidad
NO!
! ! ! !
WARNING!
To avoid injury, never put fingers or any objects whatso-
ever in the inlet port of the turbopump. The use of the pro-
tective screen is strongly advised (optional extra). If a
vibration damper or flexible metallic bellows are used on
the inlet port, make sure that the pump is fixed to the ba-
se.
The Turbo - V 1800A series pumps must only be used with one
of the special Varian controllers (series 969-9561, 969-9461)
and must be connected to a primary pump (see "Technical
Information").
The turbopump must be installed vertically or upside-down,
with a maximum slope of 10°.
The pump can either rest on its support pedestal or it can be
suspended from the high vacuum flange.
Fix the turbopump in a stable position connecting the inlet
flange of the turbopump to a fixed counter-flange capable of
withstanding a torque of 2814 Nm around its axis.
The turbopump with ISO inlet flange must be fixed to the vac-
uum chamber by means of clamps or claws. The following ta-
ble shows, for each flange and fixing device, the necessary
number of clamps or claws and the relevant fixing torque.
FLANGE
FIXING
DEVICE
ISO 250
M10 clamps
M10 claws
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian hard-
ware. See the appendix "Technical Information" for a detailed
description.
When the pump rest on its legs, attach them to the bench us-
ing teh M6 threaded holes in the legs where the rubber feet are
installed. These holes are located on a 285 mm (11.22 inches)
diameter.
For installation of optional accessories, see "Technical Infor-
mation".
USE
All the instructions for the correct use of the turbopump are
contained in the control unit manual.
Read the manual carefully before using the pump.
In order to achieve a better (lower) base pressure, the pump
casing may be heated using the optional heater. While heating
the pump, the temperature of its inlet flange must not exceed
120 °C. Always use the water cooling system during the heat-
ing operations (see annex "Technical information" for details
about the water cooling connection).
N.
FIXING TORQUE
6
22 Nm
12
22 Nm
24
! ! ! !
WARNING!
Do not touch the turbopump or any of its accessories during
the heating process. The high temperatures may cause burns.
! ! ! !
CAUTION
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
! ! ! !
CAUTION
Avoid impacts or harsh movements of the pump when in
operation.The bearings may become damaged.
! ! ! !
CAUTION
For pumping aggressive gases, these pumps are fitted with a
special port to allow a steady flow of inert gas (like N
pump bearing protection (see the appendix "Technical Informa-
tion").
! ! ! !
WARNING!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
MAINTENANCE
The Turbo-V 1800A series pump does not require any mainte-
nance. Any work performed on the pump must be carried out
by authorized personnel.
! ! ! !
WARNING!
Before carrying out any work on the turbopump, disconnect it
from the supply, vent the pump by opening the appropriate
valve, wait until the rotor has stopped turning and wait until the
surface temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned pump to replace that
broken down.
NOTE
Before returning the pump to the constructor for repairs, or re-
placement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
INSTRUCTIONS FOR USE
, Ar) for
2
87-900-867-01(A)
Publicidad
Tabla de contenido
