Technical Information; Description Of The Turbopump - Varian Turbo-V 1800A Manual De Instrucciones

DESCRIPTION OF THE TURBOPUMP

The Turbo-V1800A pump is available in three
models. The three models, which differ only in the
high vacuum flange, are:
− Model 969-9064 with ISO 250 high vacuum
flange
− Model 969-9065 with ConFlat 12" external di-
ameter high vacuum flange
− Model 969-9066 with ConFlat 12.5" external
diameter high vacuum flange
Model 969-9064
Model 969-9065
Model 969-9066
The Turbo-V1800A pump consists of a medium
frequency motor driving a turbine fitted with 12
bladed stages. The turbine rotates in an anticlock-
wise direction when viewed from the high vacuum
flange end.
The turbine is made of high-strength, light alumin-
ium alloy, and is machined from a single block of
aluminium. The first 3 high vacuum stages have
blade angles of 40°, the subsequent four stages
have blade angles of 30°, and the lower stages
have blade angles of 20°.
The turbine rotor is supported by high precision
ceramic ball bearings lubricated with a proprietary
process located on the forevacuum side of the
pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
During normal operation, the motor is fed with a
voltage of 90 Vac three-phase at 450 Hz. To re-
duce losses during start-up to a minimum, the fre-
quency increases according to a ramp with a
higher initial voltage/frequency ratio.
A water jacket surrounds the pump stator and is
used to cool the motor, which operates in the fore-
vacuum region of the pump. Cooling water is con-
nected to the pump via two riffled nozzles on the
cooling jacket.
A thermistor sensor is mounted directly on the mo-
tor stator and pump body to prevent the pump
from overheating. The thermistor sensor, the mo-
tor stator windings and the earth are connected to
a Turbo-V controller through a 7 pin socket on the
side of the pump.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.02 µm.
The pump must be mounted vertically or upside
down, with a maximum allowable slope of 10°. It
can be suspended by inlet flange or rest upon its
support legs. The connection of the forevacuum on
the side of the pump is an ISO 63 flange.
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TECHNICAL INFORMATION

87-900-867-01(A)