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Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Fast Response Performance
The curves in Figure 1-3 depict the MFC output signal and actual
transitional flow to steady-state when gas flow enters into process
chamber, under a step response command condition.
Brooks devices also feature adaptive (optimized) PID control, including fast
response. and linear ramp-up and/or ramp-down control characteristics.
Calibration Curve Selection (Analog I/O versions only)
Select one of ten gases and select PID tuning settings in analog mode.
Requires external connection of resistors between Pin # 13 and Pin # 9.
(Reference Tables 1-2 and 1-3.)
Selectable Soft Start
Processes requiring injection of gases can be adversely affected by
excessive initial gas flow. This abrupt injection of gas can result in process
damage from explosion or initial pressure impact. These problems are
virtually eliminated with the soft start feature.
Traditional soft start or linear ramp-up and/or ramp-down (See Figure 1-4)
can be factory selected or are available via the Brooks Service Suite
Linear ramp-up is adjustable at 200% per second down to 0.5% per
second setpoint change.
Figure 1-3 Response Performance of Brooks Digital MFC
Figure 1-4 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to
0.5 % Per Second Setpoint Change
Section 1 Introduction
®
Brooks
Digital MFC's & MFM's
TM
.
1-7
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