Brooks Instrument SLA5850 Manual De Instalación Y Funcionamiento página 20

Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
®
Brooks Digital MFC's & MFM's
April, 2013
Figure 1-11 Model SLA5860S Analog I/O MFM with RS-485
Figure 1-12 Model SLA5861F Digital I/O F Fieldbus MFM
OUNDATION
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