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Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Bulgarian
Brooks Instrument
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-
:
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: (1)
.
,
:
„
Brooks Instrument
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(
Brooks Insturment
„D"
„
.
CE
:
:
.
:
1.
2.
3.
:
,
,
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,
,
,
,
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,
,
.
Brooks Instrument
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,
0,5 bar (g)
(PED).
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25 mm
1" (
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25 mm
1" (
),
/
)
(
EMC 2004/108/EC).
,
,
,
"
.
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,
,
.
Section A Essential Instructions
Brooks
!
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/
Brooks Instrument
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,
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1.
I, II
III
-
,
Brooks Instrument
,
:
CE
,
.
.
(ESD)
,
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.
(ESD)
-
®
Digital MFC's and MFM's
Brooks Instrument.
,
.
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,
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.
.
,
.
.
.
(PED)
25 mm
1" (
),
PED
.
97/23/
.
PED.
(SEP).
(EMC)
,
.
100%-
.
360°.
100%-
,
,
,
.
(NMOS, SMOS
. .).
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. (2)
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A-1
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