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Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Table 4-2 Troubleshooting
Trouble
Output stays at zero
(regardless of Setpoint) and
there is flow through the
meter/controller
Flow cannot be achieved
regardless of Setpoint.
(applicable to MFC)
Output signal stays at approx.
5.5 Vdc or 22 mA
(regardless of Setpoint) and
there is flow through the
meter/controller
Output signal follows Setpoint
at higher Setpoints but will not
go below 2%
Output signal follows Setpoint
at lower Setpoints, but does
not reach full scale
Instrument grossly out of
calibration. Flow is higher than
desired.
Instrument grossly out of
calibration. Flow is lower than
desired.
Controller oscillates
(applicable to MFC)
Possible cause
Clogged Sensor
Defective electronic board
Clogged Control Valve
Valve override input is grounded
Defective electronic board
Valve leaks or is stuck open
(applicable to MFC)
+15 V applied to the valve
override input
(applicable to MFC)
Defective PC board
Control valve leaks or is stuck
open.
Insufficient inlet pressure or
pressure drop
Partially clogged sensor
Partially clogged valve
(applicable to MFC)
Valve out of adjustment
(applicable to MFC)
Valve guide spring failure
(applicable to MFC)
Partially clogged sensor
Partially clogged restrictor
Pressure drop or inlet pressure
deviates from calibrated values
Valve out of adjustment
Unstable inlet pressure
Defective PC board
Section 4 Maintenance &
Troubleshooting
Brooks
®
Digital MFC's & MFM's
Check/Corrective Action
Clean sensor. Refer to cleaning procedures
(Section 4-1-2).
Contact Brooks Instrument
Clean the control valve (Section 4-1-2) or
return the device to the factory
Check the valve override input (Pin 12)
Contact Brooks Instrument.
Clean and/or adjust control valve
(Section 4-1-2).
Check the valve override terminal (Pin 12)
Contact Brooks Instrument
Clean the control valve or return the device
to the factory (Section 4-1-2).
Adjust pressures, inspect in-line filters and
clean/replace as necessary.
Clean sensor, see cleaning procedures
(Section 4-1-2).
Clean the control valve (Section 4-1-2) or
return the device to the factory, see
cleaning proceedures
Contact Brooks Instrument
Contact Brooks Instrument
Clean sensor, see cleaning procedures
(Section 4-1-2).
Replace or clean restrictor
Adjust pressures to original specifications
Contact Brooks Instrument
Check external pressure regulator
Contact Brooks Instrument
4-7
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