Technical Specification - Varian Turbo-V 2000HT 969-9084 Serie Manual De Instrucciones

TECHNICAL SPECIFICATION

The following figure shows the Turbo-V2000HT pump outline drawing. Dimensions are in inches [mm].
Pumping speed N
2
He: 2000 l/s
H
2
Compression ratio N
2
He: 2 x 10
H
2
Base pressure* Minimum with recommended
mechanical forepump:
1 x 10
Inlet flange CFF 12" O.D.
ISO 250
Foreline flange KF 40 NW
Rotational speed 33000 RPM
Start-up time 10 minutes
Recommended DS 602
forepump TriScroll 600
Operating position Any
Cooling requirements Water
Max rotor temperature 120 °C
Operating ambient + 5° C to + 35° C
temperature
: 1950 l/s
: 1500 l/s
9
: >1 x 10
6
5
: 2 x 10
-10 -11
mbar (7.5 x 10 Torr)
Coolant water
Bakeout temperature
Max permissible rotor
temperature
Vibration level (dis-
placement)
Input
Lubricant
Installation category
Pollution degree
Storage temperature
Weight kg (lbs)
* According to standard DIN 28 428, the base pres-
sure is that measured in a leak-free test dome, 48
hours after the completion of test dome bake-out,
with a Turbopump fitted with a ConFlat flange and
using the recommended pre-vacuum pump.
53
TECHNICAL INFORMATION
minimum flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 20° C
pressure: 3 to 5 bar (45 to 75 Psi)
120° C max. at CF inlet flange
80° C max. at ISO inlet flange
120 °C
< 0.01 µm at inlet flange
120 Vac, three phase, 550 Hz
permanent lubrication
II
2
- 20° C to + 70° C
ISO 250: 44 (96.8)
CFF 12": 55 (121)
87-900-969-01(B)