Resumen de contenidos para Agilent TwisTorr 305-ICQ
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Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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FAR 12.211 (Technical Data) and 12.212 (Computer Software) and, for the Department of Defense, DFARS 252.227-7015 (Technical Data - Commercial Items) and DFARS 227.7202-3 (Rights in Commercial Computer Software or Computer Software Documentation). Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Installazione della flangia ISO-K Installazione della flangia ConFlat Collegamento della pompa di pre-vuoto Avvio e funzionamento della TwisTorr 305-ICQ & 305-IC SF Arresto della TwisTorr 305-ICQ & 305-IC SF Arresto di emergenza Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Sachgemäße Verwendung Unsachgemäße Anwendung Schutzausrüstung Sicherheitsrichtlinie für Turbomolekularpumpen Transport und Lagerung Produktbeschreibung Installation Vorbereitung zum Einbau Einrichten Montage von TwisTorr 305-ICQ & 305-IC SF Anschluss des Hochvakuumflansches Installation des ISO-K-Flansches Installation des ConFlat-Flansches Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Contents Anschluss der Vorvakuumpumpe Inbetriebnahme und Betrieb des TwisTorr 305-ICQ & 305-IC SF Stoppen des TwisTorr 305-ICQ & 305-IC SF Notausschaltung Wartung Rotordauer Sanftanlauf Reinigung Entsorgung Service Mode d’emploi À propos de ce manuel Validité Définitions et terminologie Signification des messages d’attention, d’avertissement et des notes Symboles d'avertissement Sécurité...
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Raccordement de la bride à vide élevé Installation de la bride ISO-K Installation de la bride ConFlat Raccordement de la bride à vide préliminaire Démarrage et utilisation de la TwisTorr 305-ICQ & 305-IC SF Arrêt de la TwisTorr 305-ICQ & 305-IC SF Arrêt d’urgence Entretien Durée de vie du rotor...
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Conexión de la brida de alto vaciado Instalación de la brida ISO-K Instalación de la brida ConFlat Conexión de la bomba pre-vaciado Puesta en marcha y funcionamiento de la TwisTorr 305-ICQ & 305-IC SF Parada de la TwisTorr 305-ICQ & 305-IC SF Parada de emergencia Mantenimiento Vida del rotor Arranque suave (“Soft Start”)
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安装 安装准备 设置 TwisTorr 305-ICQ & 305-IC SF 的安装 高真空法兰的连接 ISO-K 法兰的安装 ConFlat 法兰的安装 前真空泵的连接 TwisTorr 305-ICQ & 305-IC SF 的启动和运行 停止 TwisTorr 305-ICQ & 305-IC SF 紧急停止 维护 转子寿命 慢启动 清洗 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Definition of Caution, Warning and Note Warning Symbols Safety Proper use Improper use Protective equipment Safety guideline for Turbomolecular Pumps Transport & Storage Product description Installation Preparation for installation Set-up TwisTorr 305-ICQ & 305-IC SF Mounting Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Connection of the High Vacuum Flange Installation of ISO-K Flange Installation of ConFlat Flange Connection of the Fore-Vacuum Pump Startup and Operation of the TwisTorr 305-ICQ & 305-IC SF Stopping the TwisTorr 305-ICQ & 305-IC SF Emergency stop Maintenance Rotor life...
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RS485 Communication Description Windows Protocol Example (it refers to an RS485 address equal to 3) Window Description NFC Function Screenshot APP Connection through USB plug Error messages Warning messages Accessories and Spare Parts Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Collegamento della flangia per alto vuoto Installazione della flangia ISO-K Installazione della flangia ConFlat Collegamento della pompa di pre-vuoto Avvio e funzionamento della TwisTorr 305-ICQ & 305-IC SF Arresto della TwisTorr 305-ICQ & 305-IC SF Arresto di emergenza Manutenzione Vita del rotore...
Informazioni su questo manuale Validità Questo manuale elenca le istruzioni per gli utenti della TwisTorr 305-ICQ & 305-IC SF, con particolare riferimento alle nozioni relative a sicurezza, funzionamento e manutenzione di primo livello, limitatamente alle operazioni di manutenzione di cui l’utente è...
I messaggi di attenzione sono visualizzati prima di procedure che, se non ATTENZIONE osservate, potrebbero causare danni all’apparecchiatura. Le note contengono informazioni importanti e forniscono maggiori dettagli su NOTA passaggi specifici. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Simboli di avvertenza Di seguito si riporta un elenco di simboli che vengono visualizzati insieme agli avvisi della TwisTorr 305-ICQ & 305-IC SF. Viene mostrato anche il pericolo che descrivono. Un simbolo triangolare indica un’avvertenza. I significati dei simboli che possono...
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Messa a terra protettiva Non toccare Connettore principale Near Field Communication (antenna dello smartphone) Certificazione CE Certificazione CSA Limitazione della Certificazione delle Sostante Pericolose Certificazione RoHS China Rifiuti di Apparecchiature Elettriche ed Elettroniche Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Agilent Technologies declina ogni responsabilità per danni alla macchina o per la sicurezza fisica dell'operatore o di terzi, derivanti dal mancato rispetto delle norme di sicurezza indicate nella documentazione tecnica.
Istruzioni per l’uso Uso improprio Agilent Technologies declina ogni responsabilità derivante dall’uso improprio della TwisTorr 305-ICQ & 305-IC SF. L’uso improprio comporterà la perdita di tutti i reclami per responsabilità e garanzie. L’uso improprio è definito come: installazione della pompa con materiale di montaggio non ...
In generale, l'operatore deve indossare scarpe antinfortunistiche durante la manipolazione della TwisTorr 305-ICQ & 305-IC SF e durante l'installazione. Pericolo per la salute a causa di sostanze pericolose durante la AVVERTENZA manutenzione o l’installazione.
Per evitare danni alle apparecchiature e per prevenire lesioni al personale AVVERTENZA operativo, è necessario seguire scrupolosamente le istruzioni di installazione fornite nel presente manuale! Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Trasporto & Immagazzinamento Al fine di garantire il massimo livello di prestazioni e affidabilità delle pompe turbomolecolari Agilent, è necessario seguire le seguenti line guida per evitare la condensa. Durante la spedizione, lo spostamento e lo stoccaggio delle pompe, non ...
Questa attrezzatura è destinata all'uso professionale e deve essere utilizzata da professionisti. La TwisTorr 305-ICQ & 305-IC SF è una pompa turbomolecolare per applicazioni con vuoto elevato e altissimo che è in grado di pompare qualsiasi tipo di gas o composto di gas non corrosivo e ossidante.
Istruzioni per l’uso Installazione Preparazione per l’installazione La TwisTorr 305-ICQ & 305-IC SF viene fornita in un imballo protettivo speciale; se si presentano segni di danni, che potrebbero essersi verificati durante il trasporto, contattare l'ufficio vendite locale. Evitare impatti improvvisi sulla TwisTorr 305-ICQ & 305-IC SF che potrebbero essere causati dalla sua caduta.
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Istruzioni per l’uso Figura 1 Imballo della TwisTorr 305-ICQ & 305-IC SF Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Istruzioni per l’uso Apertura La TwisTorr 305-ICQ & 305-IC SF è un dispositivo elettronico sensibile alle ATTENZIONE scariche elettrostatiche e, per questo motivo, viene fornito in una custodia protettiva con tappi sulla connessione USB oltre che sulla connessione DB15. Rimuovere questi cappucci protettivi solo quando si collega la pompa al controller.
Agilent. Per ulteriori dettagli consultare la sezione "Installazione di ConFlat e ISO K”. La TwisTorr 305-ICQ & 305-IC SF non può essere fissata tramite la sua base, ATTENZIONE nè tramite altre flange che non siano di inlet.
AVVERTENZA da quelle consigliate da Agilent, esiste la possibilità che la TwisTorr 305-ICQ & 305-IC SF ruoti e si distacchi nel caso in cui il rotore si arresti improvvisamente. La combinazione di diversi tipi di flangia non è consentita. Agilent non si assume alcuna responsabilità per tutti i danni derivanti da un fissaggio improprio.
Figura 3 Utilizzare il numero richiesto di morsetti artiglio: 4 per la flangia ISO 100 4 per la flangia ISO 160 Stringere i bulloni con una coppia di 22 Nm Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
In alcuni casi, i collegamenti possono essere effettuati solo con il bullone nella parte inferiore. Prestare attenzione quando si serrano dadi e bulloni per evitare di creare ATTENZIONE ammaccature nella busta. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
La TwisTorr 305-ICQ & 305-IC SF è caratterizzata da un elevato rapporto di NOTA compressione anche per i vapori d'olio. Quando si utilizza una pompa meccanica a tenuta d'olio, è...
Avvio e funzionamento della TwisTorr 305-ICQ & 305-IC SF Per accendere la TwisTorr 305-ICQ & 305-IC SF tramite I controller di bordo, fornire alla pompa la tensione di alimentazione corretta e agire sui segnali “START” e “INTERLOCK”. Una volta riconosciuti questi segnali, il controller avvia la pompa.
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305-ICQ ON, velocità target raggiunta, stato: ON, Luce fissa NORMAL OP. On, lampeggiante 305-ICQ ON, riduzione velocità, stato: BRAKING Nessun avviso Giallo Avviso ON, Luce fissa Rosso Nessun malfunzionamento Malfunzionamento ON, Luce fissa Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Di conseguenza, se il motivo del malfunzionamento è stato risolto, alla ricezione del nuovo comando START, lo stato della luce a led rosso verrà immediatamente spento e la TwisTorr 305-ICQ & 305-IC SF funzionerà correttamente, mostrando lo stato (sulla comunicazione seriale. e dalle indicazioni led verdi) che sono appropriate alle condizioni di lavoro attuali (RAMP, NORMAL, ecc.).
Arresto della TwisTorr 305-ICQ & 305-IC SF Per arrestare la TwisTorr 305-ICQ & 305-IC SF, non in emergenza, è necessario: a) se la TwisTorr 305-ICQ & 305-IC SF è configurata in REMOTE MODE, e INTERLOCK è impostato su CONTINUOUS MODE, agire sul segnale “START”...
In caso di guasto della pompa, è possibile utilizzare il servizio di riparazione Agilent o il "servizio di cambio avanzato Agilent", che offre un sistema rigenerato per sostituire il sistema guasto. Il pezzo di ricambio della TwisTorr 305-ICQ & 305-IC SF viene spedito al momento dell'ordine.
60 giorni dall'ultimo momento in FULL SPEED. Vedi la sezione "Protocollo di Windows". Pulizia La superficie esterna della TwisTorr 305-ICQ & 305-IC SF può essere pulita solo con un detergente delicato. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Figura 5 Logo "WEEE" Per maggiori informazioni consultare: http://www.agilent.com/environment/product/index.shtml Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
È necessario completare il modulo “Request for Return” per restituire la pompa ad Agilent per l'assistenza (fornito alla fine di questo manuale). Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Einrichten Montage von TwisTorr 305-ICQ & 305-IC SF Anschluss des Hochvakuumflansches Installation des ISO-K-Flansches Installation des ConFlat-Flansches Anschluss der Vorvakuumpumpe Inbetriebnahme und Betrieb des TwisTorr 305-ICQ & 305-IC SF Stoppen des TwisTorr 305-ICQ & 305-IC SF Notausschaltung Wartung Rotordauer Sanftanlauf...
Gültigkeit Diese Betriebsanleitung enthält die Anweisungen für die Benutzer der TwisTorr 305-ICQ & 305-IC SF mit besonderer Bezugnahme auf die Begriffe für Sicherheit, Betrieb und Wartung auf der ersten Ebene, auf die Wartungsarbeiten beschränkt, für die der Benutzer verantwortlich ist.
Personen zur Folge haben könnte, wenn er nicht korrekt ausgeführt wird. Die Vorsichtshinweise werden vor Verfahren angezeigt, die Schäden am Gerät VORSICHT verursachen könnten, wenn sie nicht beachtet werden. Die Hinweise enthalten wichtige Informationen und liefern weitere Details über HINWEIS spezifische Arbeitsschritte. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Warnsymbole Das Folgende ist eine Liste von Symbolen, die in Verbindung mit den Warnungen auf dem TwisTorr 305-ICQ & 305-IC SF angezeigt werden. Die von ihnen beschriebene Gefahr wird ebenfalls angezeigt. Ein dreieckiges Symbol weist auf eine Warnung hin. Die Bedeutung der Symbole, die neben Warnhinweisen in der Dokumentation oder auf dem Gerät selbst erscheinen...
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Netz einschalten Wenn rot, bedeutet dies eine Fehlfunktion Wenn gelb, bedeutet dies eine Warnung USB-Anschluss Schutzerdungsklemme Nicht berühren Verbindungsstück Nahfeldkommunikation (Antenne des Smartphones) CE-Zertifizierung CSA-Zertifizierung Beschränkung gefährlicher Stoffe RoHS-Chinazertifizierung Elektro- und Elektronikaltgeräte Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Sicherheitsbedingungen ineffizient machen und Unfälle bei den Bedienern der Maschine verursachen. Agilent Technologies lehnt jede Verantwortung für Schäden an der Maschine oder für die physische Sicherheit des Bedieners oder Dritter ab, die sich aus der Nichtbeachtung der in den technischen Unterlagen angegebenen Sicherheitsregeln ergeben.
Betriebsanleitung Unsachgemäße Anwendung Agilent Technologies lehnt jede Verantwortung ab, die sich aus der unsachgemäßen Benutzung vom TwisTorr 305-ICQ & 305-IC SF ergibt. Bei unsachgemäßer Verwendung verfallen alle Haftungs- und Gewährleistungsansprüche. Unsachgemäße Verwendung ist definiert als. Installation der Pumpe mit nicht spezifiziertem Befestigungsmaterial ...
Sicherheitsanforderungen der in dem Land, in dem die Maschine verwendet wird, geltenden Rechtsvorschriften entsprechen. Im Allgemeinen muss der Bediener beim Umgang mit dem TwisTorr 305-ICQ & 305-IC SF und während der Installation Unfallverhütungsschuhe tragen. Gesundheitsgefahr durch gefährliche Stoffe bei Wartung oder Installation WARNUNG •...
Bei einer Funktionsstörung eines mechanischen Teils der Pumpe kann die Rotationsenergie an alle Stellen abgegeben werden, an denen die Pumpe befestigt ist. Um Geräteschäden und Verletzungen des Bedienpersonals zu vermeiden, WARNUNG sind die in diesem Handbuch enthaltenen Installationsanweisungen unbedingt zu beachten! Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Betriebsanleitung Transport und Lagerung Um die maximale Leistung und Zuverlässigkeit von Agilent Turbomolekularpumpen zu gewährleisten, müssen die folgenden Richtlinien beachtet werden, um Kondensation zu vermeiden: Beim Versand, Transport und der Lagerung von Pumpen sollten die folgenden Umgebungsbedingungen nicht überschritten werden: Temperaturbereich: Von -40 °C bis 70 °C...
Produktbeschreibung Dieses Gerät ist für den professionellen Gebrauch und für den professionellen Gebrauch bestimmt. TwisTorr 305-ICQ & 305-IC SF ist eine Turbomolekularpumpe für Hoch- und Ultrahochvakuumanwendungen, die alle Arten von nicht korrosiven und oxidierenden Gasen oder Gasverbindungen fördern kann. Die Pumpwirkung wird durch eine Hochgeschwindigkeitsturbine (max.
Wenden Sie sich an Ihr lokales Verkaufsbüro, wenn dies Anzeichen von Schäden zeigt, die während des Transports aufgetreten sein können. Vermeiden Sie plötzliche Stöße auf den TwisTorr 305-ICQ & 305-IC SF, die durch Herunterfallen verursacht werden können. Bewahren Sie den Verpackungskarton auf, um ihn bei längerer Lagerung oder beim Versand wieder verwenden zu können.
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Betriebsanleitung Abbildung 6 TwisTorr 305-ICQ & 305-IC SF-Verpackung Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Betriebsanleitung Einrichten TwisTorr 305-ICQ & 305-IC SF ist ein gegen elektrostatische Entladungen VORSICHT empfindliches elektronisches Gerät und wird bis zu diesem Zeitpunkt in einer Schutzhülle mit Kappen am USB-Anschluss sowie am DB15-Anschluss geliefert. Entfernen Sie diese Schutzkappen nur, wenn Sie die Pumpe an den Controller anschließen.
Sachschäden oder schweren oder tödlichen Verletzungen führen kann. TwisTorr 305-ICQ & 305-IC SF kann in jeder Position installiert werden. Befestigen Sie den TwisTorr 305-ICQ & 305-IC SF in einer stabilen Position und montieren Sie den Einlassflansch der Turbopumpe am Gegenflansch des Systems, wobei die Verbindung ein Drehmoment von 1000 Nm um deren Achse aushalten kann.
WARNUNG von den von Agilent empfohlenen Flanschen abweichen, besteht die Möglichkeit, dass sich der TwisTorr 305-ICQ & 305-IC SF dreht oder abreißt, falls der Rotor plötzlich stoppt. Die Kombination verschiedener Flanschtypen ist nicht zulässig. Agilent übernimmt keine Haftung für alle Schäden, die durch unsachgemäße Befestigung entstehen.
Abbildung 8 Verwenden Sie die erforderliche Anzahl von Klauenklemmen: 4 für ISO 100 Flansch 4 für ISO 160 Flansch Ziehen Sie die Schrauben mit einem Drehmoment von 22 Nm an. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
In einigen Fällen können die Verbindungen nur mit dem Bolzen in der unteren Seite hergestellt werden. Gehen Sie beim Anziehen der Schrauben und Muttern vorsichtig vor, um Beulen VORSICHT am Gehäuse zu vermeiden. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Anschluss der Vorvakuumpumpe Der Vorleitungsanschluss sollte mit dem KF 16 NW-Flansch erfolgen, der auf dem TwisTorr 305-ICQ & 305-IC SF bereitgestellt wird. Die Verbindung zur Vorpumpe kann über einen Vakuumschlauch oder ein Vakuumrohr hergestellt werden. Wenn ein starres Rohr verwendet wird, müssen Vibrationen, die von der mechanischen Pumpe erzeugt werden, mit einem Faltenbalg gedämpft werden.
Inbetriebnahme und Betrieb des TwisTorr 305-ICQ & 305-IC SF Um den TwisTorr 305-ICQ & 305-IC SF über die integrierten Controller einzuschalten, versorgen Sie die Pumpe mit der richtigen Versorgungsspannung und wirken Sie auf die Signale „START“ und „INTERLOCK“ ein. Sobald diese Signale erkannt werden, startet die Steuerung die Pumpe.
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Status: STARTEN (RAMP)/AUTO TUNING Ein, Dauerhaftes 305-ICQ ON, Zielgeschwindigkeit erreicht, Status: Licht NORMAL OP 305-ICQ ON, Geschwindigkeitsreduzierung, Status: Ein, blinkend BREMSEN Gelb Keine Warnung Warnung Ein, Dauerhaftes Licht keine Funktionsstörung Störung Ein, Dauerhaftes Licht Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Wenn der Grund für die Störung behoben wurde, wird der Status der roten LED-Leuchte beim Empfang des neuen START-Befehls sofort ausgeschaltet und der TwisTorr 305-ICQ & 305-IC SF wird ordnungsgemäß betrieben und zeigt den Status an (auf der seriellen Kommunikationsschnittstelle und durch die grüne LED-Anzeige), die dem...
Betriebsanleitung Stoppen des TwisTorr 305-ICQ & 305-IC SF Wenn sich die TwisTorr 305-ICQ & 305-IC SF nicht im Notbetrieb befindet, muss sie wie folgt angehalten werden: a) ist die TwisTorr 305-ICQ & 305-IC SF als REMOTE MODE eingerichtet und die VERRIEGELUNG auf DAUERBETRIEB eingestellt, dann betätigen Sie das Signal...
Das Ersatzteil der 305 FSQ & SF wird zum Zeitpunkt der Bestellung versandt. Schicken Sie daraufhin die nicht funktionierende TwisTorr 305-ICQ & 305-IC SF in dem Karton zurück, in dem das Ersatzteil der TwisTorr 305-ICQ & 305-IC SF war. Bevor Sie eine Pumpe zur Reparatur oder zum vorzeitigen Austausch an den HINWEIS Hersteller zurücksenden, müssen Sie unbedingt das dieser Bedienungsanleitung...
Sanftanlauf und nach 60 Tagen ab dem letzten Moment in VOLLGESCHWINDIGKEIT. Siehe Abschnitt „Windows-Protokoll“. Reinigung Die Außenfläche des TwisTorr 305-ICQ & 305-IC SF darf nur mit einem milden Reinigungsmittel gereinigt werden. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Endabnehmer sollte daher den Lieferanten des Geräts - d. h. die Muttergesellschaft oder den Wiederverkäufer - kontaktieren, um den Entsorgungsprozess zu starten, nachdem er die Verkaufsbedingungen geprüft hat. Abbildung 10 Logo „WEEE“ Für weitere Informationen siehe: http://www.agilent.com/environment/product/index.shtml Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Sie sich bitte an den örtlichen Händler oder direkt and die Email-Adresse vpt-customercare@agilent.com vpl-customercare@agilent.com Das Ausfüllen des "Request for Return" formulars ist erforderlich, um die Pumpe zur Wartung an Agilent zurückzusenden (am Ende dieses Handbuchs angegeben). Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Raccordement de la bride à vide élevé Installation de la bride ISO-K Installation de la bride ConFlat Raccordement de la bride à vide préliminaire Démarrage et utilisation de la TwisTorr 305-ICQ & 305-IC SF Arrêt de la TwisTorr 305-ICQ & 305-IC SF Arrêt d’urgence Entretien Durée de vie du rotor...
Ce manuel contient des informations utiles pour que l’ensemble du personnel NOTE puisse utiliser la TwisTorr 305-ICQ & 305-IC SF en toute sécurité et pour garantir un fonctionnement parfait pendant toute sa durée de vie. Veuillez conserver ce manuel et tous les documents connexes dans un lieu accessible connu de tous les opérateurs et du personnel de maintenance.
Les messages d’attention sont affichés au début de procédures qui, si elles ne ATTENTION sont pas respectées, peuvent entraîner des dommages aux équipements. Les remarques contiennent des informations importantes et fournissent des NOTE précisions sur certains passages particuliers. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Mode d’emploi Symboles d'avertissement Voici une liste de symboles qui apparaissent en conjonction avec les avertissements sur la TwisTorr 305-ICQ & 305-IC SF. Le danger qu’ils décrivent est également illustré. Le symbole triangulaire indique un avertissement. Les significations des symboles qui peuvent apparaître à...
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Borne de mise à la terre de protection Ne pas toucher Connecteur principal Communication en champ proche (antenne de smartphone) Certification CE Certification CSA Restriction de la certification des substances dangereuses Certification RoHS Chine Déchets d’équipements électriques et électroniques Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
à ceux qui utilisent la machine. Agilent Technologies décline toute responsabilité pour les dommages causés à la machine ou pour la sécurité physique de l’opérateur ou des tiers résultant du non- respect des règles de sécurité...
Mode d’emploi Utilisation inappropriée Agilent Technologies décline toute responsabilité en raison de l’utilisation inappropriée de la TwisTorr 305-ICQ & 305-IC SF. Une utilisation inappropriée entraînera l’annulation de toutes les créances et garanties. Une utilisation inappropriée est définie comme suit : installation de la pompe avec un matériau de montage non spécifié...
En règle générale, l’opérateur doit porter des chaussures de sécurité pendant la manipulation de la TwisTorr 305-ICQ & 305-IC SF et pendant son installation. Danger pour la santé en raison de la présence de substances AVERTISSEMENT dangereuses pendant la maintenance ou l’installation.
être libérée sur la pompe à laquelle elle est fixée. Pour éviter d’endommager les équipements et prévenir les risques de AVERTISSEMENT blessure des opérateurs, respectez rigoureusement les instructions d’installation fournies dans le présent manuel. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
60 jours de la pompe. Si, pour une raison quelconque, la durée de conservation est dépassée, la ATTENTION pompe doit être retournée à l’usine. Contacter le représentant local Agilent Vacuum Sales and Service pour plus d’informations. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Cet équipement est destiné à un usage professionnel et doit être utilisé par des professionnels. TwisTorr 305-ICQ & 305-IC SF est une pompe turbomoléculaire pour les applications à vide élevé et ultra-élevé capable de pomper tout type de composé gazeux ou gazeux non corrosif et oxydant.
Mode d’emploi Installation Préparation pour l’installation TwisTorr 305-ICQ & 305-IC SF est fourni dans un emballage de protection spécial. Si l'on constate des marques de dommages pouvant s'être produits pendant le transport, contacter aussitôt le bureau de vente local. Éviter les impacts soudains sur la TwisTorr 305-ICQ & 305-IC SF qui seraient causés par la chute.
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Mode d’emploi Figure 11 Emballage de la TwisTorr 305-ICQ & 305-IC SF Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Mode d’emploi Configuration La TwisTorr 305-ICQ & 305-IC SF est un appareil électronique ATTENTION sensible aux décharges électrostatiques, et, à ce point, il est livré dans un sac de protection avec des capuchons sur le raccord USB ainsi que sur le raccord DB15. Retirer ces capuchons de protection uniquement lors du raccordement de la pompe au contrôleur.
Agilent approprié. Pour plus de détails, voir la section « Installation de la ConFlat et de l’ISO K ». La TwisTorr 305-ICQ & 305-IC SF ne peut pas être fixée par sa base ni par des ATTENTION brides autres que celles d’entrée.
AVERTISSEMENT brides différentes de celles recommandées par Agilent, la TwisTorr 305-ICQ & 305-IC SF risque de se tordre ou de se déchirer en cas d’arrêt soudain du rotor. La combinaison de différents types de brides n’est pas autorisée. Agilent n’acceptera aucune responsabilité...
Figure 13 Utiliser le nombre requis de brides de serrage : 4 pour la bride ISO 100 4 pour la bride ISO 160 Serrez les boulons au couple de 22 Nm. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Dans certains cas, les raccordements peuvent être faits seulement avec le boulon dans le côté inférieur. Faire preuve de prudence lors du serrage des écrous et des boulons pour éviter ATTENTION de créer des bosselures dans l’enveloppe. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Le raccordement avant doit être effectué à l’aide de la bride KF 16 NW fournie sur la TwisTorr 305-ICQ & 305-IC SF. Le raccordement à la pompe de première ligne peut être fait par un tuyau ou conduit de vide. Si un tuyau rigide est utilisé, toute vibration générée par la pompe mécanique doit être amortie par l’utilisation de...
DB15 monté sur l’unité de commande. Il peut être utilisé, après câblage approprié, à la fois pour brancher le TwisTorr 305-ICQ & 305-IC SF à la source d’alimentation et aux accessoires (ventilateur de refroidissement, valves de purge) mais aussi à...
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: OP. NORMALE 305-ICQ Allumé, réduction de la vitesse, Allumé, clignotant statut : FREINAGE Jaune Éteint Aucune alerte Avertissement ALLUMÉ, voyant constant Rouge Éteint Aucun dysfonctionnement Dysfonctionnement ALLUMÉ, voyant constant Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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été résolue, lors de la réception de la nouvelle commande START, l’état du voyant rouge sera immédiatement désactivé et la TwisTorr 305-ICQ & 305-IC fonctionnera correctement, indiquant l’état (sur la comm. en série et par les indications LED vertes) qui est adapté à la condition de travail actuelle (RAMP, NORMAL, etc.).
Pour arrêter la TwisTorr 305-ICQ & 305-IC SF, en dehors d’une situation d’urgence, il faut: a) si la TwisTorr 305-ICQ & 305-IC SF est configurée en REMOTE MODE et qu’INTERLOCK est paramétré sur CONTINUOUS MODE, intervenir sur le signal «...
Agilent ou le « service d’échange avancé Agilent », qui vous fournit un système réusiné pour remplacer le système défaillant. La pièce de rechange de la TwisTorr 305-ICQ & 305-IC SF est expédiée au moment de la commande. Il faut donc renvoyer la TwisTorr 305-ICQ & 305-IC SF défaillante dans la boîte qui contenait la pièce de rechange de la TwisTorr 305-ICQ &...
60 jours suivant le dernier moment en PLEINE VITESSE. Voir la section « Protocole Windows ». Nettoyage La surface extérieure de la TwisTorr 305-ICQ & 305-IC SF ne peut être nettoyée qu’avec un détergent doux. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Figure 15 Logo « DEEE » Pour plus de précisions, veuillez consulter : http://www.agilent.com/environment/product/index.shtml Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
à: vpt-customercare@agilent.com vpl-customercare@agilent.com Vous devez remplir le formulaire de “Request for Return” pour retourner votre pompe à Agilent pour l’entretien (fourni à la fin du présent manuel). Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Descripción del producto Instalación Preparación para instalación Puesta en marcha Montaje de la TwisTorr 305-ICQ & 305-IC SF Conexión de la brida de alto vaciado Instalación de la brida ISO-K Instalación de la brida ConFlat Conexión de la bomba pre-vaciado Puesta en marcha y funcionamiento de la TwisTorr 305-ICQ &...
Este manual contiene información útil para que todo el personal que utilice la NOTA bomba TwisTorr 305-ICQ & 305-IC SF pueda operarla de manera segura y garantizar un rendimiento perfecto, durante toda su vida útil. Guarde este manual, junto con todas las publicaciones relacionadas, en un lugar conocido y accesible para todos los operadores/personal de mantenimiento.
Los mensajes de precaución se muestran antes de los procedimientos que, si PRECAUCIÓN no se respetan, pueden causar daños al equipo. Las notas están previstas para llamar la atención sobre información importante y NOTA proporcionar más detalles en relación con pasos específicos. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Símbolos de advertencia La siguiente es una lista de los símbolos que aparecen en conjunto con las advertencias en la bomba TwisTorr 305-ICQ & 305-IC SF. También se muestra el peligro que describen. Un símbolo triangular indica una advertencia. Los significados de los símbolos que pueden aparecer junto a las advertencias en la documentación son los siguientes:...
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Terminal protectora de tierra No tocar Conector principal Near Field Communication (antena de smartphone) Certificación CE Certificación CSA Certificación de Restricción de Sustancias Peligrosas Certificación China RoHS Equipo de Desecho Eléctrico y Electrónico Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Agilent Technologies niega cualquier responsabilidad por daños a la máquina o la seguridad física del operario o terceras partes derivados del incumplimiento de las reglas de seguridad indicadas en la documentación técnica.
Instrucciones de uso Uso incorrecto Agilent Technologies niega cualquier responsabilidad derivada del uso incorrecto de la TwisTorr 305-ICQ & 305-IC SF. El uso incorrecto anulará todas las reclamaciones por responsabilidad y garantías. El uso incorrecto se define como: instalación de la bomba con el material de montaje incorrecto ...
En general, el operador debe usar zapatos antiaccidentes durante la instalación y manipulación de la bomba TwisTorr 305-ICQ & 305-IC SF. Peligro para la salud debido a la presencia de sustancias peligrosas ADVERTENCIA durante el mantenimiento o la instalación.
Para evitar daños al equipo y prevenir lesiones al personal operativo, se ADVERTENCIA deben cumplir estrictamente las instrucciones de instalación indicadas en este manual. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Instrucciones de uso Transporte y almacenamiento Para garantizar el máximo nivel de rendimiento y fiabilidad de las bombas turbomoleculares de Agilent, las siguientes pautas deben seguirse para evitar la condensación. cuando se envíen, mueve o almacenen las bombas, no deberán excederse las ...
Este equipo está destinado a uso profesional y deberá ser utilizado por profesionales. La TwisTorr 305-ICQ & 305-IC SF es una bomba turbomolecular para aplicaciones de vacío ultra alto que puede bombear cualquier tipo de gas o compuesto de gas no corrosivo y oxidante.
Utilice guantes u otra protección adecuada siempre. La exposición normal al ambiente no puede dañar la TwisTorr 305-ICQ & 305-IC SF. NOTA Sin embargo, es aconsejable mantenerla sellada en su bolsa de plástico hasta que esté...
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Instrucciones de uso Figura 16 Embalaje de la TwisTorr 305-ICQ & 305-IC SF Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Instrucciones de uso Puesta en marcha La TwisTorr 305-ICQ & 305-IC SF es un dispositivo electrónico sensible a las PRECAUCIÓN descargas electrostáticas y, por este motivo, está equipada con bolsas protectoras con tapas en la conexión USB y en la conexión DB15. Extraiga estas tapas protectoras solo cuando conecte la bomba al controlador.
La TwisTorr 305-ICQ & 305-IC SF puede ser instalada en cualquier posición. Fije la TwisTorr 305-ICQ & 305-IC SF en una posición estable, montando la brida de entrada de la turbobomba en el sistema de la contrabrida, con una conexión capaz de soportar una torsión de 1000 Nm alrededor de su eje.
Si la bomba está fijada a una cámara de vacío con bridas diferentes a ADVERTENCIA las recomendadas por Agilent, es posible que la TwisTorr 305-ICQ & 305-IC SF se tuerza o se rompa si el rotor se detiene de repente. La combinación de diferentes tipos de bridas no está...
Figura 18 Utilice el número de pinzas de garra requerido: 4 para brida ISO 100 4 para brida ISO 160 Ajustar los tornillos con un par de 22 Nm. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
En algunos casos, las conexiones solo pueden hacerse con el tornillo en la cara inferior. Tenga cuidado cuando apriete las tuercas y tornillos para evitar abollar la PRECAUCIÓN envoltura. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
La conexión de prevacío debe hacerse utilizando la brida KF 16 NW proporcionada en la TwisTorr 305-ICQ & 305-IC SF. La conexión a la bomba prevacío puede hacerse mediante una manguera o tubo apropiada para vacío. Si se utiliza un tubo rígido, cualquier vibración generada por la bomba mecánica debe ser amortiguada...
DB15 que está montado en la unidad de control. Puede ser utilizado, después de cablearse adecuadamente, tanto para conectar la TwisTorr 305-ICQ & 305-IC SF a la fuente de alimentación y a las partes de los accesorios (ventilador, válvulas de descarga) y el puerto serial comm...
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305-ICQ ON, velocidad meta alcanzada, estado: ON, luz continua NORMAL OP Encendido, 305-ICQ ON, reducción velocidad, estado: BRAKING parpadeando Amarillo Apagado No advertencia Advertencia ON, luz continua Rojo Apagado No avería Avería ON, luz continua Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Cuando la razón de la advertancia haya sido resuelta, la luz led amarilla se apagará inmediatamente, y en la mayoría de los casos, el usuario no necesita realizar ninguna otra acción en la TwisTorr 305-ICQ & 305-IC SF. Solo en muy pocos casos, para poder reiniciar la señal de advertencia, el usuario tiene que apagar la unidad.
Para detener la TwisTorr 305-ICQ & 305-IC SF cuando no hay una emergencia, es necesario: a) si la TwisTorr 305-ICQ & 305-IC SF está configurada en REMOTE MODE, y el INTERLOCK está en CONTINUOUS MODE, actúe sobre la señal de "START" o actúe sobre la señal "INTERLOCK";...
50ºC. Si la bomba falla, puede utilizar el servicio de reparación de Agilent o el "servicio de intercambio avanzado de Agilent", que le proporcionará un sistema refabricado para sustituir el sistema averiado.
60 días desde el último momento en FULL SPEED. Consulte la sección “Windows Protocol”. Limpieza La superficie exterior de la TwisTorr 305-ICQ & 305-IC SF puede ser limpiada con detergente suave solamente. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Casa Matriz o con un revendedor, para iniciar el proceso de recolección y eliminación después de verificar las condiciones contractuales de venta. Figura 20 Logotipo “WEEE” Para más información, consulte: http://www.agilent.com/environment/product/index.shtml Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Es obligatorio completar la “Request for Return” para devolver su bomba a Agilent para mantenimiento (proporcionada al final del presente manual). Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Connection of the High Vacuum Flange Installation of ISO-K Flange Installation of ConFlat Flange Connection of the Fore-Vacuum Pump Startup and Operation of the TwisTorr 305-ICQ & 305-IC SF Stopping the TwisTorr 305-ICQ & 305-IC SF Emergency stop Maintenance Rotor life...
About this manual Validity This manual lists the instructions for the users of the TwisTorr 305-ICQ & 305-IC SF, with particular reference to the notions relating to safety, operation and first level maintenance, limited to maintenance operations for which the user is responsible.
Caution messages are displayed before procedures which, if not observed, could CAUTION cause damage to the equipment. Notes are intended to call attention to important information and provide more NOTE detail regarding specific steps. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
The following is a list of symbols that appear in conjunction with warnings on the TwisTorr 305-ICQ & 305-IC SF. The hazard they describe is also shown. A triangular symbol indicates a warning. The meanings of the symbols that may...
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USB port Protective Ground Terminal Do Not Touch Main connector Near Field Communication (smartphone's antenna) CE certification CSA certification Restriction of Hazardous Substances certification RoHS China certification Waste Electrical and Electronic Equipment Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Agilent Technologies declines all responsibility for damage to the machine or for the physical safety of the operator or third parties deriving from the non-observance of the safety rules indicated in the technical documentation.
Instructions for Use Improper use Agilent Technologies declines all responsibility, deriving from the improper use of the TwisTorr 305-ICQ & 305-IC SF. Improper use will cause all claims for liability and warranties to be forfeited. Improper use is defined as: installation of the pump with unspecified mounting material ...
In general, the operator must wear accident-prevention shoes while handling the TwisTorr 305-ICQ & 305-IC SF and during installation. Danger to health by hazardous substances during maintenance or WARNING installation.
To avoid damage to equipment and to prevent injuries to operating WARNING personnel the installation instructions as given in this manual should be strictly followed! Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Instructions for Use Transport & Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps, the following guidelines must be followed to avoid condensation. when shipping, moving and storing pumps, the following environmental ...
This equipment is intended for professional use and to be used by professionals. The TwisTorr 305-ICQ & 305-IC SF is a turbomolecular pump for high and ultrahigh vacuum applications which is able to pump any type of non corrosive and oxidizing gas or gas compound.
Instructions for Use Installation Preparation for installation The TwisTorr 305-ICQ & 305-IC SF is supplied in a special protective packaging. If this shows signs of damage which may have occurred during transport, contact your local sales office. Avoid sudden impacts to the TwisTorr 305-ICQ & 305-IC SF that would be caused by dropping it.
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Instructions for Use Figure 31 TwisTorr 305-ICQ & 305-IC SF packaging Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Instructions for Use Set-up The TwisTorr 305-ICQ & 305-IC SF is an electronic device sensitive to CAUTION electrostatic discharges, and, to this point, it is supplied in a protective bag with caps on the USB connection as well as on the DB15 connection. Remove these protective caps only when connecting the pump to the controller.
The TwisTorr 305-ICQ & 305-IC SF can be installed in any position. Fix the TwisTorr 305-ICQ & 305-IC SF in a stable position, mounting the inlet flange of the turbopump to the system counter-flange, with a connection capable of withstanding a torque of 1000 Nm around its axis.
WARNING from those recommended by Agilent, there is the chance of the TwisTorr 305-ICQ & 305-IC SF twisting or tearing-off in case the rotor suddenly stops. The combination of different flange types is not allowed. Agilent will not accept any liability for all damages resulting from improper fastening.
Figure 33 Use the required number of claw clamps: 4 for ISO 100 flange 4 for ISO 160 flange Tighten the bolts with a torque of 22 Nm. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
In some cases, the connections can be made only with the bolt in the lower side. Exercise care when tightening nuts and bolts to avoid creating dents in the CAUTION envelope. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
The foreline connection should be made using the KF 16 NW flange provided on the TwisTorr 305-ICQ & 305-IC SF. The connection to the foreline pump can be made by a vacuum rated hose or pipe. If a rigid pipe is used, any vibration generated by the mechanical pump must be damped through the use of bellows.
Instructions for Use Startup and Operation of the TwisTorr 305-ICQ & 305-IC SF To turn on the TwisTorr 305-ICQ & 305-IC SF via the on board controllers, supply the pump with the proper supply voltage and then act on the "START"and "INTERLOCK"...
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305-ICQ is running, target speed achieved, status: normal ON, Solid light operation. 305-ICQ is running, ramp-down due to speed reduction On, blinking command, status: BRAKING. Yellow No Warning. Warning. ON, Solid light No Malfunction. Malfunction. ON, Solid light Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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TwisTorr 305-ICQ & 305-IC SF. Only in a very few cases, in order to properly reset the warning signal, the user has to power off the unit.
TwisTorr 305-ICQ & 305-IC SF is configured in REMOTE MODE, and the INTERLOCK is set to IMPULSE MODE, then open the “START” signal; c) if the TwisTorr 305-ICQ & 305-IC SF is configured in SERIAL Mode, then send a STOP command to the TwisTorr 305-ICQ & 305-IC SF.
50° C. In the event the pump fails, you can use the Agilent repair service or the “Agilent advanced exchange service”, which gets you a remanufactured system to replace the failed system.
60 days from the last moment in FULL SPEED. See “Windows Protocol” section. Cleaning The exterior surface of the TwisTorr 305-ICQ & 305-IC SF may be cleaned with mild detergent only. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Parent Company or a retailer, to initiate the collection and disposal process after checking the contractual terms and conditions of sale. Figure 35 Logo "WEEE" For more information refer to: http://www.agilent.com/environment/product/index.shtml Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Completion of the “Request for Return” form is required to return your pump to Agilent for service (provided at the end of this manual). Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Technical Information Technical Information Description of the TwisTorr 305-ICQ & 305-IC SF Technical specification TwisTorr 305-ICQ & 305-IC SF Outline Pump Operations Inlet screen installation Air Cooling Kit Installation (only for air cooled pumps) Assembling procedure Air Cooling Kit X3500-68010...
Technical Information Description of the TwisTorr 305-ICQ & 305-IC SF The TwisTorr 305-ICQ & 305-IC SF consists of a high frequency induction motor driving a turbine fitted with 9 bladed stages and 3 MacroTorr drag stages. The turbine rotates in a counterclockwise direction when viewed from the high vacuum flange end.
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Technical Information The TwisTorr 305-ICQ & 305-IC SF is available in various models that differ in the high vacuum flange. The TwisTorr 305-ICQ & 305-IC SF models are: Code Model X3513-64060 TwisTorr 305-ICQ WATER, ISO100, 485A X3513-64061 TwisTorr 305-ICQ AIR, ISO100, 485A...
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Technical Information The following figures shows the 7 models. The optional air cooling fan is shown in the drawings. Figure 36 Model X3513-64060 Figure 37 Model X3513-64061 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 38 Model X3513-64061 with air cooling Figure 39 Model X3513-64062 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 40 Model X3513-64063 Figure 41 Model X3513-64064 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 42 Model X3513-64065 Figure 43 Model X3513-64066 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 44 Model X3513-64066 with air cooling Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Technical Information Technical specification The following tables list the main technical data of the TwisTorr 305-ICQ & 305-IC SF. Table 1 TwisTorr 305-ICQ Technical Specification TwisTorr 305-ICQ - Technical data Pumping speed ISO 100 250 l/s 255 l/s 220 l/s...
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In case the user does not have a 24Vdc power output already available, the power supply MFR: MeanWell; MPN: NDR-240-24 is suitable for the application Protection fuse Max operating altitude 3000 m Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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2 x 10 : 2.1 x 10 1 x 10 He: 1.4 x 10 2 x 10 : 1 x 10 NOTE: For all other technical specifications, please refer to table 1. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information When the TwisTorr 305-ICQ & 305-IC SF has been stored at a temperature less NOTE than 5°C, wait until the system has reached the above mentioned temperature before switch the TwisTorr 305-ICQ & 305-IC SF on. Figure 45 Maximum allowed relative humidity as a function of the air temperature for each cooling-water temperature Agilent TwisTorr 305-ICQ &...
Technical Information TwisTorr 305-ICQ & 305-IC SF Outline The following figures show the TwisTorr 305-ICQ & 305-IC SF (dimensions are in mm [inches]). Figure 46 TwisTorr 305-ICQ WATER, ISO 100, 485A (X3513-64060) Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 47 TwisTorr 305-ICQ AIR, ISO 100, 485A (X3513-64061) Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 48 TwisTorr 305-ICQ AIR, ISO 100, 485A (X3513-64061 with air cooling) Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 49 TwisTorr 305-ICQ WATER, CFF 6, 485A (X3513-64062) Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 50 TwisTorr 305-ICQ AIR, CFF 6, 485A (X3513-64063) Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 51 TwisTorr 305-ICQ WATER, ISO 160, 485A (X3513-64064) Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 52 TwisTorr 305-ICQ WATER, CFF 8, 485A (X3513-64065) Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 53 TwisTorr 305-IC SF AIR ISO 100 485A (X3513-64066) Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 54 TwisTorr 305-IC SF AIR ISO 100 485A (X3513-64066 with air cooling) Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 55 Graph of Pumping Speed vs. Inlet Pressure for TwisTorr 305-ICQ & 305-IC SF pump Figure 56 Graph of Compression ratio vs. Foreline Pressure for TwisTorr 305-ICQ & 305-IC SF pump Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 57 Graph of Pumping Speed vs. Side port for TwisTorr 305-ICQ & 305-IC SF pump Figure 58 Graph of Iso Flow-Iso Power for TwisTorr 305-ICQ & 305-IC SF with Nitrogen gas (water cooling version with water temperature in range 15°C-20°C, backing pump 11.6 m /h p Agilent TwisTorr 305-ICQ &...
Inlet screens help prevent damage to the blades by preventing foreign objects from entering the pump. The following part numbers belong to the corresponding flange: 9699302 (CFF 6’’) 9699304 (CFF 8’’) X3500-68000 (ISO 100) X3500-68001 (ISO 160 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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The inlet screen is fitted in the upper part of the pump, as shown in the figure. Figure 61 The screen can be mounted on each pump. The screen can be removed as shown in the following figure. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 62 The overall flange dimensions with the protection screen fitted on pump do not change as the inlet screen remains integrated into the center-ring. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Technical Information Air Cooling Kit Installation (only for air cooled pumps) An air cooling kit is available to improve the TwisTorr 305-ICQ & 305-IC SF cooling during operational conditions. Fan specifications: air flow: 147 m input voltage: 24 Vdc ...
Technical Information Assembling procedure Air Cooling Kit X3500-68010 To mount the air cooling Kit on the TwisTorr 305-ICQ & 305-IC SF pump, proceed as follows: Fix the fan (1) to the bracket (2) using the furnished screws (3). Figure 64 Mounting the fan on the bracket...
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Technical Information Now fix the air cooling bracket/fan assembly to the pump body. Figure 65 On board CNTR Foreline flange KF16 VENT screw Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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(see figure on the next page) of the pump and then connect the air cooling kit connector to the adapter connector (6), by the way of the extension cable which is provided to together with the adapter P/N X3514-68001. Figure 66 Overview of TwisTorr 305-IC adapter Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Figure 67 Connector DB15 (item 5) on pump edge The picture shows the pump with the optional cooling fan. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 9699337 (metallic model), and 9699347 (plastic model). Figure 68 Model 9699337 Figure 69 Model 9699347 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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The assembled kit must be screwed into the suitable holes of the pump body with a recommended torque of 5 Nm. The metallic model is assembled as shown in the following figure. Figure 71 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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50 l/h (0.22 GPM). The max water inlet pressure must be lower than 5 bar. The water electrical conductance must be ≤ 500 µs/cm. When the conductivity is NOTE higher, in closed water circuit, the use of up to 20 % of Ethyl-Glycole is recommended. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Technical Information Vent Accessories The vent valve and vent device enable an automatic vent operation. TwisTorr 305-ICQ & 305-IC SF compatible Vent Valve mod. 9699834 – 9699834M006. Figure 72 This vent valve waits before opening a minimum time of about 5 sec. This time can be increased up to about 220 min.
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To install the vent valve, unscrew the threaded plug (see figure below). Figure 73 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2.5 Nm. Figure 74 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Fan/Vent Adapter kit P/N X3514-68001, when the assembly is completeted. Figure 75 Do not overtighten the valve as this may damage the thread on the pump. CAUTION Then connect the cable from the valve to the suitable connector on the controller. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Adjust the pressure regulator in order to read a gas flow rate of 0.1 to 0.8 mbar l/s. To prevent bearing damage, Agilent suggests a minimum purge gas flow rate of CAUTION 10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process requirements.
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Technical Information Figure 76 Purge layout Purge gas line Pressure regulator Gas purge valve Gas purge port Forevacuum pump Turbopump Vent valve Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Figure 77 and then screw the gas purge valve (with a torque of 2.5 Nm) as shown in the following figure. Figure 78 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
9699334 for CFF 6” flange; model 9699335 for CFF 8” flange. They typically reduce the vibration transmitted from the TwisTorr 305-ICQ & 305-IC SF to the system by a factor of 20. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Technical Information Controller Operations Interconnections The following figure shows the TwisTorr 305-ICQ & 305-IC SF on board interconnections. Figure 79 In the picture it is shown the adapter P/N X3514-68001 connected to the pump. Vent valve connector. Cooling fan connector.
This connector carries all the input and output signals to remote control the TwisTorr 305-ICQ & 305-IC SF. It is a 15-pins D type connector; the available signals are detailed in the table, the following paragraphs describe the signal characteristics and use. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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For RS485 communication: RS485 COM PORT Standard RS485, 8 bit no parity bit, n.1 start bit, n.1..2 stop bit RS485 COM PORT Supply Voltage Input Note: All potentials refer to pin 15 (GND). Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
PWM duty cycle >75% will ensure a rotational frequency equal to the one that has been set via the serial command; the default factory setting for the rotational target frequency is 1010Hz. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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When the reference size is Power, the relation is: ANALOG OUTPUT Vout =10V --> Output power = 200W When the reference size is Temperature, the relation is ANALOG OUTPUT Vout =10V --> Pump Body Temperature = 125°C Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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24 Vdc and becomes 0 Vdc when activated). Moreover, if the reference quantity is the frequency or the current drawn, it is possible to set the hysteresis (in % of the threshold value) to avoid bouncing. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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2 % activation type: high level delay time: 0 second. The TwisTorr 305-ICQ & 305-IC SF Software (optional) allows the operator to set NOTE all the programmable feature. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Reference connection circuit for digital input WARNING If the power supply for the digital input is supplied by an external power supply then pin 15 on the controller should be connected to ground. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Technical Information How to Connect the Controller Outputs The following figure shows a typical logic output connection for pin 8, 9, 10 or 11. Figure 87 Reference connection circuit for digital output circuit Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
The communication protocol RS485 has the same structure of the RS232, but it manages the address field. Communication Format 8 data bit no parity 1 stop bit baud rate: 600/1200/2400/4800/9600 programmable Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
‘0’ = OFF ‘1’ = ON Numeric (N) ‘-‘, ‘.’, ‘0’ . . . ‘9’ right justified with ‘0’ Alphanumeric (A) from blank to ‘_’ (ASCII) <ETX> (End of transmission) = 0x03 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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(0x34) the value expressed during a write command is out of the range value of the specified window 1 byte Win Disabled (0x35) the specified window is Read Only or temporarily disabled Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Example (it refers to an RS485 address equal to 3) Command: START Source: PC Destination: Pump ADDR WINDOW Source: Pump Destination: PC ADDR Command: STOP Source: PC Destination: Pump ADDR WINDOW Source: Pump Destination: PC ADDR Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Command: SOFT-START (ON) Source: PC Destination: Pump ADDR WINDOW Source: Pump Destination: PC ADDR Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
1010Hz Always Always Target Frequency It defines the target excitation frequency Maximum 1010Hz Always Always It defines the maximum frequency settable by WIN120 frequency Always Always Set vent valve Set vent valve Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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4 = Thermalpad Overtemp 3 = Vdc (supply) Under Voltage 2 = Controller Over Temp 1 = Pump Over Temp 0 = No connection to pump controller Always It reads the MOSFET bridge temperature temperature Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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It indicates the bus current filter value with T=1hour Always Average Power It indicates the power supplied filter value with T=1hour Always Average Frequency It indicates the driving frequency filter value with T=1hour Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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It defines the serial address in RS485 communication Always Always RS485 Address (accessible with every serial address) Always Always Run Up time Run Up time Always Always RUTimeCtrl Run Up time control Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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High Level Low Level 11 chars 11 chars 4 chars Reset 10 chars Impulse Continuous - 10 chars 10 chars 10 chars °C 65535 0,2s °C 65535 0,2s 1/10V °C °C °C °C °C hours Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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E: Thermal pad over temperature F: Vdc over voltage G: Fault DRV8305 H: Too high load I: Rotor locked L: RFU/Not used (RFU=Reserved for Future Use) M: Body HW over temperature N: Run Up Time Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
NFC icon on the controller. WARNING Before downloading the dedicated App, check the compatibility with the operating system of the device used. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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NFC icon on the controller and take the smartphone at a distance less than 2 cm (1 in). Figure 90 NFC connection with 305-IC and mobile devices NOTE This function can also be used when the pump is off. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
Connection through USB plug Figure 92 USB Port Connect the Micro USB "B" cable to the TwisTorr 305-ICQ & 305-IC SF. The USB port is recognized by PC as "Virtual COM". All windows and related features of the Windows protocol are available on the "Virtual COM"...
Check for the pump rotor can spin freely. Restart the pump Fault DRV8305 Mosfet bridge driver Contact Agilent to get ON, Solid ON, Inv failure appropriate directions Flash Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Gas Load selection, application. as shown below: Wait for the pump (Ar) --> 50°C temperature to return ) --> 55°C below the related (He) --> 60°C threshold. Restart the pump. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
(they have to match with the output specifica- tions) and check it for the absence of short circuits/lack of insulation. If NO, contact Agilent to get the appropriate directions Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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OFF/ON Blinking/ load/unit- integrity). but the no load is connected Solid Flashing/ If NO LOAD is applied to the to the output Inv.Flashing/ outputs, these warnings are Solid meaningless, please disregard them. Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
The communication S/W between the controller and the pump (A-Plus) is available NOTE on the Agilent website: https://www.agilent.com/en/products/vacuum-technologies/vacuum-leak- detection-software/a-plus-software The connection is provided through USB (use a standard USB A male - USB B male Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...
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Technical Information Agilent TwisTorr 305-ICQ & 305-IC SF User Manual...