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The turbopump with ISO inlet flange must be fixed to the
vacuum chamber by means of clamps or claws. The following
table shows, for each flange and fixing device, the necessary
number of clamps or claws and the relevant fixing torque.
FLANGE
FIXING
DEVICE
ISO 63
M10 clamps
M8 claws
ISO 100
M10 clamps
M8 claws
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian
hardware. See the appendix "Technical Information" for a
detailed description.
NOTE
The DRYVAR 150 cannot be fixed by means of its base.
For installation of optional accessories, see "Technical
Information".
USE
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of
the system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C.
! ! ! !
Never use the turbopump when the inlet flange is not
connected to the vacuum chamber or is not blanked.
! ! ! !
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
! ! ! !
CAUTION
Avoid impacts or harsh movements of the pump when in
operation. The bearings may become damaged.
! ! ! !
CAUTION
Use inert gas free from dust, particles or humidity (like
Nitrogen) for venting the pump. The pressure at the vent port
must be less than 2 bar (above atmospheric pressure).
For pumping aggressive gases, these pumps are fitted with a
special port to allow a steady flow of inert gas (like N
pump bearing protection (see the appendix "Technical
Information").
! ! ! !
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
N.
FIXING
TORQUE
4
22 Nm
4
11 Nm
4
22 Nm
8
11 Nm
WARNING!
WARNING!
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2
WARNING!
Switching on and Use of DRYVAR 150
To switch on the DRYVAR 150 it is necessary to supply the
mains. The integrated controller automatically recognizes the
mains presence and start up the pump.
The first pump start up is in "Soft Start" mode. When the start
up cycle is finished, the "Soft Start" mode automatically is
disabled, and the following start ups are without the "Soft Start"
mode. To re-enable the "Soft Start" mode it must be activated
by the suitable software command (see the paragraph "RS 232
COMMUNICATION DESCRIPTION" in the appendix "Technical
Information").
During the "Soft Start", when the vent valve is installed, after
the Start command only the primary pump is activeted for 2
minutes and the vent valve is opened to allow the cleaning of
the pump valves from humidity. If the "soft Start" is not
activated, then the waiting time is of 30 seconds.
When the vent valve is not installed, vent the pump manually
after the Start command until the pump starts the rotation.
Always use inert gas free from dust, particles or humidity during
such operations.
The green LED LD1 located on the DRYVAR 150 base front
panel indicates with its flashing frequency the system operating
conditions:
•
with no flashing: the pump is normally rotating;
•
slowly flashing (period of about 400 ms): the system is in
ramp, or in braking, or in Stop, or in "Waiting for interlock"
status;
•
fast flashing (period of about 200 ms): error condition.
DRYVAR 150 Switching off
To switch off the DRYVAR 150 it is necessary to remove the
mains. The integrated controller immediately stops the pump.
Emergency Stop
To immediately stop the DRYVAR 150 in an emergency
condition it is necessary to remove the supply cable from the
mains plug.
MAINTENANCE
The DRYVAR 150 does not require any maintenance. Any work
performed on the system must be carried out by authorized
personnel.
Before carrying out any work on the system, disconnect it from
the mains, vent the pump by opening the appropriate valve,
wait until the rotor has stopped turning and wait until the
surface temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned system to replace that
broken down.
Before returning the system to the constructor for repairs, or
replacement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be
inserted in the system package before shipping.
If a system is to be scrapped, it must be disposed of in
accordance with the specific national standards.
24
INSTRUCTION MANUAL
NOTE
! ! ! !
WARNING!
NOTE
87-900-920-01(B)
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