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Controller Description
The integrated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer and is composed of a PCB which in-
cludes a power supply with a 3-phase AC output
and a DC output to supply the internal diaphragm
forepump, analog and input/output section, micro-
processor and digital section.
The controller recognizes the mains presence and
converts the single phase AC mains supply into a
3-phase, medium frequency output which is re-
quired to power the pump, and into a DC, low volt-
age, output to supply the diaphragm forepump.
The controller can be operated by a remote host
computer via the serial connection.
Diaphragm Forepump Description
The pump consists of an electric DC motor driving
an eccentric which moves an elastic diaphragm.
The pump has two heads connected in series.
The compression chamber is hermetically sepa-
rated from the drive mechanism by means of the
diaphragm.
The pump transfers, evacuates and compresses
completely oil-free.
During normal operation, the motor is supplied with
a voltage between 7 and 24 Vdc according to the
gas load in order to increase the pump life.
NOTE
A diaphragm pump cleaning from the humidity is
recommended to improve the system performance.
If the vent valve device is installed, the cleaning
procedure is done automatically at every start. If
the vent valve device is not installed it is recom-
mended to open manually the vent valve after
every start command for about 30 seconds.
It's possible to decrease the pump-down time or to
work with high levels of load by using an external
foreline pump:
1.
Connect the KF16 flange (you can find it in the
attached accessories bag) to the "OPTION
FORELINE" port.
2.
Use the KF16 port to connect your auxiliary
foreline pump.
Never connect an external foreline pump to the ex-
haust port (it could damage the device).
TECHNICAL SPECIFICATION
Pumping speed (with inlet
screen)
N
2
He:
H
2
Compression ratio
Base pressure
(According to standard DIN
28 428, the base pressure
is that measured in a leak-
free test dome, 48 hours
after the completion of test
dome bake-out, with a
Turbopump fitted with a
ConFlat flange and using
the recommended pre-
vacuum pump)
Inlet flange
Rotational speed
Start-up time
Operating position
Operating ambient
temperature
Bakeout temperature
Vibration level (displace-
ment)
Lubricant
Input power supply:
Voltage:
Frequency:
Max input power:
Stand-by power:
Max operating
power:
Protection fuse
Compliance with:
Power cable
RS 232 cable
Storage temperature
Weight kg (lbs)
26
TECHNICAL INFORMATION
! ! ! !
WARNING!
ISO 100:
ISO 63:
:
125 l/s
105 l/s
120 l/s
107 l/s
:
100 l/s
100 l/s
8
N
: 3 x 10
2
5
He: 8 x 10
4
H
: 8 x 10
2
with external mechanical
pump (Varian SD40):
-10
< 2 x 10
mbar
-10
(< 2 x 10
with internal diaphragm pump:
-8
4 x 10
mbar
-8
(4 x 10
torr)
ISO 100, ISO 63, CFF 6",
CFF 4.5"
62000 rpm
< 90 seconds
Any
5° to 35° C
120° C at inlet flange max.
< 0.01 µm at inlet flange
permanent lubrication
90 to 132 Vac
180 to 264 Vac
47 to 63 Hz
180 W at 230 Vac
15 W at 230 Vac
130 W at 230 Vac
1 x 3.15 A
EN 55011 class A group 1 /
EN 61010-1 / IEC 1000-4-2 /
IEC 1000-4-3 / IEC 1000-4-4
With European and USA plug
3 meters long
3 meters long terminated with
a 9-pin D type connector and
a 6-pin RJ type connector
- 20° C to + 70° C
CFF 6"/4.5": 9 (19.8)
ISO 100/63: 6 (13.2)
87-900-920-01(B)
Torr)
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