Agilent Technologies Turbo-V 2K-G Serie Manual De Instrucciones página 363

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Figure 48
Turbo-V 2K-G Pumping System User Manual / 87-900-968-01
Close the corrosive gas flow into the system.
Leaving the Turbo-V 2K-G pump and the backing pump running
and the purge gas flowing, wait for enough time to evacuate the
corrosive gas from the system.
Turn off the Turbopump.
Open the Turbo-V 2K-G vent electro valve up to the atmospheric
pressure in the system.
When the Turbo-V 2K-G pump and the backing pump are stopped
and the system is at atmospheric pressure, for a better bearing
protection it is advisable to leave the purge gas flowing into the
Turbo-V pump, with the chamber or the Turbo-V vent valve
opened, to avoid system overpressures. If the vent valve can't be
kept opened, the backing pump should be left operating.
1 Purge gas line
2 Pressure regulator
3 Purge and vent port
4 Forevacuum pump
5 Turbopump
6 Water line
Purge and vent layout
Technical Information
Pump Purging and Venting
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