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Section 1 Introduction
Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
Brooks
®
VDM100 Vapor Delivery Module
Figure 1-4 Front View Details of the VDM100
Figure 1-4 (above) shows a detailed view of the switches and indicators
located on the front of the VDM100. The following is a description of each
switch and indicator.
ZERO: This is a momentary switch that activates a zeroing function to
remove any zero offset that may have accumulated over time during normal
VDM100 operation. Refer to the section called VDM100 Zeroing later in this
manual for information on when and how to use this function properly.
FAULT: (Red LED) This indicates an alarm/fault condition.
WARMUP: (Amber LED)This indicates when the VDM100 is warming up
(solid) or at the desired temperature (blinking).
READY: (Green LED)This indicates when the VDM100 is Ready-to-Use
(RTU). lt also serves as an indicator when a drain cycle is complete
(blinkíng).
NOTE: A more detailed explanation of LED states and their meaning can
be found in Section 3.0 VDM100 Operation.
ADDRESS: These 2 rotary switches (MSD and LSD) are used to set the
serial address (for RS-485 communication) of the VDM100. The two
switches create a 2-digit address as in the following example: if the MSB
switch is set to 1 and the LSB is set to 2, the serial address would be "12".
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