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Section 5 Maintenance & Troubleshooting
®
Brooks
VDM100 Vapor Delivery Module
5.2 General Troubleshooting
5.3 Using the Brooks GUI as a Diagnostics Tool
5-2
Refer to Table 5-1 for general troubleshooting information.
Table 5-1 General Troubleshooting Information and Courses of Action
Some general troubleshooting steps to follow are:
1. Verify all installation steps have been performed as outlined in previous
sections of this manual.
2. Verify that all electrical connections to the VDM100 meet the
specifications explained in previous sections of this manual.
3. Make sure all fittings and connections to the VDM100 are secure.
4. Verify that all operating conditions of the system in which the VDM100 is
installed have been met for proper operation.
a. proper fluid for current desired mode of operation
b. fluid supply pressure
c. outlet pressure
lf these steps do not correct the problem, contact Brooks technical support
for further assistance.
The Brooks GUI can be a very usefultool in diagnosing a possible problem
with the VDM100. As explained in Section 4.0, if the VDM100 experiences
a fault condition, it will put out an alarm signal on Pin 4 or Pin 10 of the DB-
15 depending on the problem detected. Using the GUI will allow access to
the specific fault condition the VDM100 has detected. Table 5-2 shows a list
of the possible alarm codes that theVDM100 can display. ln these tables are
descriptions of the possible problems and courses of action to follow to
correct these problems.
Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
Table 2-1
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