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Brooks Instrument VDM100 Serie Manual Del Usuario página 8

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Section 1 Introduction
Brooks
®
VDM100 Vapor Delivery Module
1.4 Product Description Code
Table 1-1 VDM100 Product Description Code
Code Description
Code Description
Code Description
Code Description
Code Description
I. I. I. I. I.
Base Model Code
I. I. I. I. I.
Fluid
III.
III.
III.
III. Flow Range
III.
I V I V I V I V I V. . . . .
AC Supply Voltage
V V V V V . . . . .
Fittings
VI.
VI.
VI.
VI.
VI.
Orientation
VII.
VII.
VII.
VII.
VII. Reserved
Note: Devices will ship with embedded software Version 1.10 unless otherwise specified.
For additional flow ranges please contact Product Management.
Sample Model Code
Sample Model Code
Sample Model Code
Sample Model Code
Sample Model Code
I I I I I
II II II II II
III III III III III
V D M
V D M
V D M
V D M
V D M
W W W W W
3 0 0 0
3 0 0 0
3 0 0 0
3 0 0 0
3 0 0 0
1-2
The following Product Description Code (PDC) identifies the VDM100 and
its optional features. This code is used to order the product. Call your
Brooks Customer Service Center if you need assistance.
Code
Code
Code
Code
Code
V D M
V D M
V D M
V D M
V D M
W W W W W
3 0 0 0
3 0 0 0
3 0 0 0
3 0 0 0
3 0 0 0
1 1 1 1 1
2 2 2 2 2
1 1 1 1 1
2 2 2 2 2
V V V V V
(Blank)
(Blank)
(Blank)
(Blank)
(Blank)
I V I V I V I V I V
V V V V V
V I V I V I V I V I
VII
VII
VII
VII
VII
1 1 1 1 1
1 1 1 1 1
V V V V V
Installation and Operation Manual
Code Description
Code Description
Code Description
Code Description
Code Description
Vapor Delivery Module
DI Water
3 slpm
110 Vac, 50 Hz
230 Vac, 60 Hz
4 VCR M Inlet / 8 VCR M Outlet
4 S M inlet / 8 VCR M Outlet (with leak containment collar)
Vertical, Inlet Down
None
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012

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