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Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
Figure 2-2 VDM100 Installation Orientation
2.8.2 VDM100 Mounting and Orientation
2.9 Mechanical Connections
Brooks
Figure 2-2 shows the proper mounting orientation for the VDM100.The
VDM100 should be mounted using four 5/16" (7.9mm) screws tightening them
to the recommended manufacturer specifications.
Figure 2-1 shows the mechanical dimensions of the VDM100.
Section 2 Installation
®
VDM100 Vapor Delivery Module
2-5
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