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Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
1.1 Introduction
1.2 Intended Use
1.3 Product Identification Label
Brooks
This user guide covers the Brooks Vapor Delivery Module (VDM100) Series
shown in Figure 1-1. lncluded herein is a product description, installation
instructions, operating instructions, instructions for utilizing the Brooks
Graphical User lnterface (GUl), troubleshooting information, and product
warranty information.
Front Side
Bottom
(DI Water Inlet)
Figure 1-1 VDM100 Vapor Delivery Module
The VDM100 is a self contained module that is used for the delivery of ultra
high purity water vapor in semiconductor applications such as advanced
strip and post metal etch passivation processes. The VDM100 produces
vapor in the non-super heated vapor stage to reduce the aggressive effects
of de-ionized water.
The VDM100 is identified through the Product ldentification Label located at
the front of the unit. This label (shown in Figure 1-2) identifies the VDM100
by part number, serial number and flow range.
Figure 1-2 Product Identification Label
Section 1 Introduction
®
VDM100 Vapor Delivery Module
Top
(Vapor Delivery End)
1-1
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