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Contents
Brooks
®
VDM100 Vapor Delivery Module
Figure
Number
1-1
VDM100 Vapor Delivery Module ................................................................................................. 1-1
1-2
Product Identification Label ........................................................................................................ 1-1
1-3
Front View of the VDM100 ......................................................................................................... 1-3
1-4
Front View Details of the VDM100 .............................................................................................. 1-4
1-5
Bottom View of the VDM100 ....................................................................................................... 1-5
1-6
VDM100 Block Diagram ............................................................................................................. 1-7
2-1
VDM100 Dimensions .................................................................................................................. 2-4
2-2
VDM Installation Orientation ........................................................................................................ 2-5
2-3
Diagram of the Electrical Connections to the VDM100 ............................................................... 2-7
4-1
Brooks GUI Main Screen ............................................................................................................ 4-1
4-2
The Brooks GUI VDM100 Interface Screen ................................................................................ 4-2
Table
Number
1-1
VDM100 Product Description Code ........................................................................................... 1-2
1-2
VDM100 Product Specifications ................................................................................................. 1-9
2-1
VDM100 Input/Output Connector Pin-Out ................................................................................... 2-8
3-1
Signals Required for Switching Modes on the VDM100 .............................................................. 3-1
5-1
General Troubleshooting Information and Courses of Action ...................................................... 5-2
5-2
List of Possible Alarm Codes Detected by the VDM100 ........................................................ 5-3 to 5-7
ii
Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
Number
Page
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