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Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
3.2.2 Ready-to-Use (Normal Mode)
Brooks
For most other situations, however, the VDM100 will compute a shorter time
to complete the Start-up sub-mode. This computed time depends upon the
deviation of the MFC temperature from its operational set point. Some
example situations where the VDM100 will typically compute and execute a
shortened Start-up sub-mode time are as follows:
• The VDM100 is put into drain mode to drain the water from the tank
and then put back into normal mode as soon as possible (typically
less than 30 minutes)
• lf the VDM100 is put into ldle mode temporarily (typically less than
30 minutes) and then put back into Normal mode
• lf powerto the VDM100 is lost or removed temporarily (typically less
than 30 minutes) and the Normal mode signal is present when
power is returned
6. The VDM100 outputs the "Ready-to-Use" signal(s): Once the VDM 100
has completed the Start-up sub-mode, it will pull Pin 13 of the DB-15 to
ground and turn the green "READY" LED on. This indicates that it is in
Normal mode and ready to deliver water vapor on demand.
When the VDM100 is in Normal mode and has reached its "Ready-to-Use"
condition, Pin 13 of the DB-15 is pulled to ground and the green "READY"
LED is on. The amber "WARMUP" LED will be flashing indicating that the
internal temperatures (MFC and tank) are at set point and stable. The red
"FAULT" LED should be off. lf the "FAULT" LED is on then proceed to
Section 5.0 Maintenance & Troubleshooting.
At this time the VDM100 is ready to receive set points from the tool and
begin delivering water vapor. The set point signal is received from the tool
on Pin I of the DB-15. lt needs to be a 0-5 Vdc analog signal. The signal is
interpreted as a scale to represent the full scale flow range of the VDM100.
As an example, a 3 slpm (3000 sccm) VDM100 would interpret a 2.5 Vdc
set point from the tool as a command to flow 50% of full scale which would
be 1.5 slpm (1500 sccm).
When the VDM100 begins flowing water vapor at the given set point it will put
out a flow signal from Pin 2 of the DB-15. This signal is an analog 0-5 Vdc
signal scaled to represent the full scale flow range of the VDM100. As an
example, a 3 slpm (3000 sccm) VDM100 would output a 2.5 Vdc signal if it were
flowing at 50% of its full scale range, which would be 1.5 slpm (1500 sccm).
The VDM100 will flow water vapor at 100% of its full scale range up to a
maximum pressure of 200 Torr (26.66 kPa) at its outlet.
It is important to make certain that the Dl water supply is connected to the inlet
and pressurized to 10-40 psig while the VDM100 is in Normal mode. This is
required because the VDM100 will actively maintain a nominal Dl water level in
its tank by periodically refilling itself.
Section 3 Operation
®
VDM100 Vapor Delivery Module
3-3
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