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Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
Brooks
4. This section shows the operation mode and status of the VDM100.
The "Switch State" fìeld indicates what mode to which the VDM100 is
set. The "System State" field indicates what portion of the operational
mode that the VDM100 is in, such as the final stage of warming up for
Normal mode as shown.
5. lf the VDM100 has a fault condition, this field will show an alarm code.
This code can be used to help troubleshoot a possible problem that the
VDM100 is experiencing. See Section 5.2 for detailed descriptions of
the possible alarm codes.
6. This section allows the user to configure the active state of Pin 4, Pin
10, and Pin l3 of the DB-15 connector. As described in Section 2.10 of
this manual these pins signal the tool about alarm conditions and
whether the VDM100 is in a "Ready-to-Use" state. By making use of this
part of the VDM screen, a user can set up the desired active states of
those signal pins or reset them to factory default.
Section 4 Operation of GUI
®
VDM100 Vapor Delivery Module
4-3
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