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Section 2 Installation
®
Brooks
VDM100 Vapor Delivery Module
2.8 Installation Instructions
2.8.1 Product Dimensions and Inlet Fitting Configurations
2-4
Figure 2-1 VDM100 Dimensions
The installation of the VDM100 involves mounting the device, making the
required mechanical connections and making the required electrical
connections.
Figure 2-1 below shows the mechanical dimensions of the VDM100.
Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
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