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Section 3 Operation
®
Brooks
VDM100 Vapor Delivery Module
3.2.1 Start-up (Normal Mode)
3-2
When Pin 3 of the DB-15 on the VDM100 is grounded, the VDM100 goes
into the Start-up sub-mode to prepare for Normal mode. Depending on the
state of the VDM100 (temperature, water level, etc.) when the Normal
mode signal is given, it will take between 5 and 55 minutes to complete the
Start-up sub-mode. The Start-up sub-mode functions as follows:
1. Pin 3 of the DB-15 is grounded by the user: This signals the VDM100 to
begin normal operation in the Normal mode. This pin must remain
grounded to keep the VDM100 in Normal mode.
2. The VDM100 checks the tank water level: The VDM100 will take one of
two courses of action once the water level is determined:
• A VDM100 that has an empty tank will open the MFC to the outlet fitting
and evacuate the tank. A source of vacuum at the outlet fitting needs to
be provided for the tank evacuation to happen. The VDM100 will keep
the MFC open to the outlet fitting for 90 seconds to insure that the tank is
completely evacuated. Then it will close the MFC and open the water inlet
valve to fill the tank with Dl water. Make sure that the DI water source is
connected and pressurized to 10-40 psig.
• A VDM100 that has been installed and has been previously operated on a
tool could possibly have some amount of water in it. The VDM100 checks
the water level in its tank and will fill it as needed. Make sure that the DI
water source is connected and pressurized to 10-40 psig.
3. DC Heater is turned on: The DC heaters will come on the moment that
the Pin 3 of the DB-15 is grounded and begin heating the internal MFC to
its nominal operating temperature.
4. AC tank heaters will come on when water is detected in the tank: The AC
tank heaters will activate as soon as water is detected in the tank and begin
warming to nominal operating temperature.
5. The VDM100 completes the Start-up sub-mode: Completion of the Start-
up sub-mode occurs once all the proper operating conditions have been
met. The proper operating conditions are as follows:
• The water level in the tank is at normal operational level
• The tank temperature is at operating set point and stable
• The MFC temperature is at operating set point and stable
As stated prevíously the Start-up sub-mode can take from 5 to 55 minutes
to complete. This is due to the fact that it takes some time for the VDM100
to reach operational temperature which is required for the proper delivery
of water vapor. A VDM100 will require 55 minutes to complete the Start-up
sub-mode when:
• lt has just been installed; all internal temperatures will be at room ambience
and the water tank will be empty
• lt has been in ldle mode or powered down for longer than 30 minutes
(typically) and/or the water tank is empty
Installation and Operation Manual
X-VAP-VDM100-eng
Part Number: 541B178AAG
December, 2012
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