Description - Brooks Instrument GF100 Serie Manual De Instrucciones

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017

1-10 Description

Ultra Fast Response
The Brooks GF Series patented flow sensor combined with a high speed
ARM processor and fast acting diaphragm-free valve assembly enables:
• Faster response and settling time for improved wafer throughput
• Ultra-fast 1-2 second etch step processing
• Reduced diverted gas consumption and associated abatement costs
• Time sensitive gas delivery steps in Atomic Layer Deposition
• User programmable start-up function for processes requiring a slow
ramped gas turn-on or time critical transitions between flow rates
MultiFlo™ Gas and Range Configurability
The Brooks MultiFlo technology delivers exceptional improvement in
process gas accuracy for linear and non-linear gases. This is achieved
through advanced gas modeling and optimized through actual gas testing.
Brooks MultiFlo TM allows the device to be quickly and easily configured for
another gas and/or flow range without sacrificing accuracy or rangability.
Selecting a new gas automatically creates a new calibration curve,
establishes optimized PID settings for dynamic control, automatically
compensates for gas density effects, and ensures smooth overshoot-free
transitions between flow rates with excellent steady-state stability. Brooks
MultiFlo technology offers unparalleled flexibility. An extensive gas
database is provided and a single device can be quickly programmed for
thousands of different gas and flow range combinations. Process benefits
achieved:
• Mass flow controller full scale full range can be rescaled down typically by a
factor of 3:1 with no impact on accuracy, turndown or leak by specifications
• Optimum process and inventory flexibility resulting in dramatically reduced
inventory costs
• Fewer configurations/bin sizes required to support many different processes
• Less down-time with rapid process recovery
Support References: Brooks MultiFlow Configurator Quick
TM
MultiFlo
Start Guide (X-SW-MultiFlo-Config-QS-eng (Part Number: 541B167AAG))
MultiFlo TM Configurator Accessory Kits:
778Z010ZZZ Basic MultiFlo Configurator Kit
*Software, MultiFlo Configurator
A331710003 Cable Assembly 2.5mm
214F027AAA USB-RS485 Converter with DB-9 female
778Z011ZZZ Basic MultiFlo Configurator Kit w/Power Supply and
Adapter Cables *Software, MultiFlo Configurator
A331710003 Cable Assembly 2.5mm
214F027AAA USB-RS485 Converter with DB-9 female
A332295001 Power Supply MFC
A332297002 Cable, Power, 9-Pin
A332297001 Cable, Power, DeviceNet
* MultiFlo Configurator Software is available on the Brooks Instrument
website at: www.BrooksInstrument.com/MultiFlo
www.BrooksInstrument.com/Documentation&Downloads
Section 1 Introduction
GF100 Series
1-5