Brooks Instrument GF100 Serie Manual De Instrucciones página 32

Section 2 Installation
GF100 Series
2-6
Figure 2-4 GF100 Series Mounted to K1 Series Substrate Blocks
Figure 2-5 Mounting Screws Torque Pattern
Table 2-1 K1 Series Fasteners
Connection
K1S
GF 100 Series M4 x 34mm
to or
Subtstrate M4 x 35mm
Table 2-2 K1 Substrate Torque Data
Connection Torque Pattern
GF125 to Use a square pattern as
Subtstrate shown in Figure 2-5.
Start at 25 inch-pounds and
increase in increments of
10 inch-pounds until proper
value is obtained.
4. Using a torque wrench and a metric hex key, tighten the screws to the
torque value as described in Table 2-2 and Torque Pattern Figure 2-5.
5. If your GF100 Series is configured with ¼" VCR fittings, secure the
GF100 Series block to the gas panel with two, 8-32-UNC-2B" screws.
Then connect the inlet/ outlet fittings to the gas supply line using two
wrenches. Tighten the fittings to manufacturer recommendations.
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
3
1
4
2
Fastener Size
K1R2
M5 x 30mm M5 x 37mm
Torque (Inch-Pounds)
K1S K1R2
45 45
April, 2017
K1H
K1H
45